JPS52130569A - Preparation of reticle for electron beam exposure - Google Patents

Preparation of reticle for electron beam exposure

Info

Publication number
JPS52130569A
JPS52130569A JP4754176A JP4754176A JPS52130569A JP S52130569 A JPS52130569 A JP S52130569A JP 4754176 A JP4754176 A JP 4754176A JP 4754176 A JP4754176 A JP 4754176A JP S52130569 A JPS52130569 A JP S52130569A
Authority
JP
Japan
Prior art keywords
electron beam
beam exposure
reticle
preparation
nonpermeability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4754176A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5311831B2 (enrdf_load_stackoverflow
Inventor
Yoshinobu Takeuchi
Koichi Tatsuno
Yuji Oba
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP4754176A priority Critical patent/JPS52130569A/ja
Publication of JPS52130569A publication Critical patent/JPS52130569A/ja
Publication of JPS5311831B2 publication Critical patent/JPS5311831B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4754176A 1976-04-26 1976-04-26 Preparation of reticle for electron beam exposure Granted JPS52130569A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4754176A JPS52130569A (en) 1976-04-26 1976-04-26 Preparation of reticle for electron beam exposure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4754176A JPS52130569A (en) 1976-04-26 1976-04-26 Preparation of reticle for electron beam exposure

Publications (2)

Publication Number Publication Date
JPS52130569A true JPS52130569A (en) 1977-11-01
JPS5311831B2 JPS5311831B2 (enrdf_load_stackoverflow) 1978-04-25

Family

ID=12777991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4754176A Granted JPS52130569A (en) 1976-04-26 1976-04-26 Preparation of reticle for electron beam exposure

Country Status (1)

Country Link
JP (1) JPS52130569A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5311831B2 (enrdf_load_stackoverflow) 1978-04-25

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