JPS52126760U - - Google Patents

Info

Publication number
JPS52126760U
JPS52126760U JP3530576U JP3530576U JPS52126760U JP S52126760 U JPS52126760 U JP S52126760U JP 3530576 U JP3530576 U JP 3530576U JP 3530576 U JP3530576 U JP 3530576U JP S52126760 U JPS52126760 U JP S52126760U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3530576U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3530576U priority Critical patent/JPS52126760U/ja
Publication of JPS52126760U publication Critical patent/JPS52126760U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP3530576U 1976-03-24 1976-03-24 Pending JPS52126760U (US07166745-20070123-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3530576U JPS52126760U (US07166745-20070123-C00016.png) 1976-03-24 1976-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3530576U JPS52126760U (US07166745-20070123-C00016.png) 1976-03-24 1976-03-24

Publications (1)

Publication Number Publication Date
JPS52126760U true JPS52126760U (US07166745-20070123-C00016.png) 1977-09-27

Family

ID=28494655

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3530576U Pending JPS52126760U (US07166745-20070123-C00016.png) 1976-03-24 1976-03-24

Country Status (1)

Country Link
JP (1) JPS52126760U (US07166745-20070123-C00016.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62118526A (ja) * 1985-09-27 1987-05-29 エイ・ティ・アンド・ティ・コーポレーション 荷電粒子ビ−ム リソグラフイ−方法および装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3638231A (en) * 1968-05-27 1972-01-25 Tno Device for recording with electron rays
JPS5091274A (US07166745-20070123-C00016.png) * 1973-12-12 1975-07-21

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3638231A (en) * 1968-05-27 1972-01-25 Tno Device for recording with electron rays
JPS5091274A (US07166745-20070123-C00016.png) * 1973-12-12 1975-07-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62118526A (ja) * 1985-09-27 1987-05-29 エイ・ティ・アンド・ティ・コーポレーション 荷電粒子ビ−ム リソグラフイ−方法および装置

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