JPS5211776A - Method of manufacturing semiconductor device - Google Patents

Method of manufacturing semiconductor device

Info

Publication number
JPS5211776A
JPS5211776A JP50086679A JP8667975A JPS5211776A JP S5211776 A JPS5211776 A JP S5211776A JP 50086679 A JP50086679 A JP 50086679A JP 8667975 A JP8667975 A JP 8667975A JP S5211776 A JPS5211776 A JP S5211776A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacturing semiconductor
equpped
aginst
taper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50086679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5621268B2 (enrdf_load_stackoverflow
Inventor
Kazuo Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP50086679A priority Critical patent/JPS5211776A/ja
Publication of JPS5211776A publication Critical patent/JPS5211776A/ja
Publication of JPS5621268B2 publication Critical patent/JPS5621268B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
JP50086679A 1975-07-17 1975-07-17 Method of manufacturing semiconductor device Granted JPS5211776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50086679A JPS5211776A (en) 1975-07-17 1975-07-17 Method of manufacturing semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50086679A JPS5211776A (en) 1975-07-17 1975-07-17 Method of manufacturing semiconductor device

Publications (2)

Publication Number Publication Date
JPS5211776A true JPS5211776A (en) 1977-01-28
JPS5621268B2 JPS5621268B2 (enrdf_load_stackoverflow) 1981-05-18

Family

ID=13893696

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50086679A Granted JPS5211776A (en) 1975-07-17 1975-07-17 Method of manufacturing semiconductor device

Country Status (1)

Country Link
JP (1) JPS5211776A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577927A (en) * 1980-06-17 1982-01-16 Matsushita Electronics Corp Manufacture of semiconductor
JPS57134972A (en) * 1981-02-13 1982-08-20 Mitsubishi Electric Corp Semiconductor device
US4594606A (en) * 1982-06-10 1986-06-10 Nec Corporation Semiconductor device having multilayer wiring structure
JPH022631A (ja) * 1988-06-17 1990-01-08 Nec Corp Ｍｏｓトランジスタ及びその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3472712A (en) * 1966-10-27 1969-10-14 Hughes Aircraft Co Field-effect device with insulated gate
JPS5079279A (enrdf_load_stackoverflow) * 1973-11-12 1975-06-27

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3472712A (en) * 1966-10-27 1969-10-14 Hughes Aircraft Co Field-effect device with insulated gate
JPS5079279A (enrdf_load_stackoverflow) * 1973-11-12 1975-06-27

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS577927A (en) * 1980-06-17 1982-01-16 Matsushita Electronics Corp Manufacture of semiconductor
JPS57134972A (en) * 1981-02-13 1982-08-20 Mitsubishi Electric Corp Semiconductor device
US4594606A (en) * 1982-06-10 1986-06-10 Nec Corporation Semiconductor device having multilayer wiring structure
JPH022631A (ja) * 1988-06-17 1990-01-08 Nec Corp Ｍｏｓトランジスタ及びその製造方法

Also Published As

Publication number Publication date
JPS5621268B2 (enrdf_load_stackoverflow) 1981-05-18

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