JPS5211485B2 - - Google Patents

Info

Publication number
JPS5211485B2
JPS5211485B2 JP6553372A JP6553372A JPS5211485B2 JP S5211485 B2 JPS5211485 B2 JP S5211485B2 JP 6553372 A JP6553372 A JP 6553372A JP 6553372 A JP6553372 A JP 6553372A JP S5211485 B2 JPS5211485 B2 JP S5211485B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6553372A
Other languages
Japanese (ja)
Other versions
JPS4925629A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6553372A priority Critical patent/JPS5211485B2/ja
Publication of JPS4925629A publication Critical patent/JPS4925629A/ja
Publication of JPS5211485B2 publication Critical patent/JPS5211485B2/ja
Expired legal-status Critical Current

Links

JP6553372A 1972-06-30 1972-06-30 Expired JPS5211485B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6553372A JPS5211485B2 (en:Method) 1972-06-30 1972-06-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6553372A JPS5211485B2 (en:Method) 1972-06-30 1972-06-30

Publications (2)

Publication Number Publication Date
JPS4925629A JPS4925629A (en:Method) 1974-03-07
JPS5211485B2 true JPS5211485B2 (en:Method) 1977-03-31

Family

ID=13289731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6553372A Expired JPS5211485B2 (en:Method) 1972-06-30 1972-06-30

Country Status (1)

Country Link
JP (1) JPS5211485B2 (en:Method)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5683086A (en) * 1979-12-11 1981-07-07 Matsushita Electric Ind Co Ltd Luminous semiconductor device and its manufacture
JPH0658976B2 (ja) * 1984-12-29 1994-08-03 株式会社豊田中央研究所 化合物半導体装置の製造方法
JPH02232922A (ja) * 1989-03-06 1990-09-14 Nec Corp 不純物のドーピング方法

Also Published As

Publication number Publication date
JPS4925629A (en:Method) 1974-03-07

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