JPS5211049U - - Google Patents

Info

Publication number
JPS5211049U
JPS5211049U JP9563975U JP9563975U JPS5211049U JP S5211049 U JPS5211049 U JP S5211049U JP 9563975 U JP9563975 U JP 9563975U JP 9563975 U JP9563975 U JP 9563975U JP S5211049 U JPS5211049 U JP S5211049U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9563975U
Other languages
Japanese (ja)
Other versions
JPS5531813Y2 (US07652168-20100126-C00068.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9563975U priority Critical patent/JPS5531813Y2/ja
Publication of JPS5211049U publication Critical patent/JPS5211049U/ja
Application granted granted Critical
Publication of JPS5531813Y2 publication Critical patent/JPS5531813Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP9563975U 1975-07-11 1975-07-11 Expired JPS5531813Y2 (US07652168-20100126-C00068.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9563975U JPS5531813Y2 (US07652168-20100126-C00068.png) 1975-07-11 1975-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9563975U JPS5531813Y2 (US07652168-20100126-C00068.png) 1975-07-11 1975-07-11

Publications (2)

Publication Number Publication Date
JPS5211049U true JPS5211049U (US07652168-20100126-C00068.png) 1977-01-26
JPS5531813Y2 JPS5531813Y2 (US07652168-20100126-C00068.png) 1980-07-29

Family

ID=28577417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9563975U Expired JPS5531813Y2 (US07652168-20100126-C00068.png) 1975-07-11 1975-07-11

Country Status (1)

Country Link
JP (1) JPS5531813Y2 (US07652168-20100126-C00068.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08162423A (ja) * 1994-11-30 1996-06-21 Shinetsu Quartz Prod Co Ltd 枚葉式ウエーハ熱処理装置とその装置に用いる反応容器の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08162423A (ja) * 1994-11-30 1996-06-21 Shinetsu Quartz Prod Co Ltd 枚葉式ウエーハ熱処理装置とその装置に用いる反応容器の製造方法

Also Published As

Publication number Publication date
JPS5531813Y2 (US07652168-20100126-C00068.png) 1980-07-29

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