JPS5196363U - - Google Patents

Info

Publication number
JPS5196363U
JPS5196363U JP1420775U JP1420775U JPS5196363U JP S5196363 U JPS5196363 U JP S5196363U JP 1420775 U JP1420775 U JP 1420775U JP 1420775 U JP1420775 U JP 1420775U JP S5196363 U JPS5196363 U JP S5196363U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1420775U
Other languages
Japanese (ja)
Other versions
JPS543646Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1420775U priority Critical patent/JPS543646Y2/ja
Publication of JPS5196363U publication Critical patent/JPS5196363U/ja
Application granted granted Critical
Publication of JPS543646Y2 publication Critical patent/JPS543646Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1420775U 1975-01-31 1975-01-31 Expired JPS543646Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1420775U JPS543646Y2 (enrdf_load_stackoverflow) 1975-01-31 1975-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1420775U JPS543646Y2 (enrdf_load_stackoverflow) 1975-01-31 1975-01-31

Publications (2)

Publication Number Publication Date
JPS5196363U true JPS5196363U (enrdf_load_stackoverflow) 1976-08-02
JPS543646Y2 JPS543646Y2 (enrdf_load_stackoverflow) 1979-02-20

Family

ID=28092492

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1420775U Expired JPS543646Y2 (enrdf_load_stackoverflow) 1975-01-31 1975-01-31

Country Status (1)

Country Link
JP (1) JPS543646Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020107904A (ja) * 2020-03-13 2020-07-09 光洋サーモシステム株式会社 熱処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020107904A (ja) * 2020-03-13 2020-07-09 光洋サーモシステム株式会社 熱処理装置
JP2021143822A (ja) * 2020-03-13 2021-09-24 光洋サーモシステム株式会社 熱処理装置
JP2021143823A (ja) * 2020-03-13 2021-09-24 光洋サーモシステム株式会社 熱処理装置

Also Published As

Publication number Publication date
JPS543646Y2 (enrdf_load_stackoverflow) 1979-02-20

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