JPS5192646A - - Google Patents

Info

Publication number
JPS5192646A
JPS5192646A JP50017292A JP1729275A JPS5192646A JP S5192646 A JPS5192646 A JP S5192646A JP 50017292 A JP50017292 A JP 50017292A JP 1729275 A JP1729275 A JP 1729275A JP S5192646 A JPS5192646 A JP S5192646A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50017292A
Other languages
Japanese (ja)
Other versions
JPS6037881B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50017292A priority Critical patent/JPS6037881B2/ja
Publication of JPS5192646A publication Critical patent/JPS5192646A/ja
Publication of JPS6037881B2 publication Critical patent/JPS6037881B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP50017292A 1975-02-10 1975-02-10 パタ−ン欠陥検査装置 Expired JPS6037881B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50017292A JPS6037881B2 (ja) 1975-02-10 1975-02-10 パタ−ン欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50017292A JPS6037881B2 (ja) 1975-02-10 1975-02-10 パタ−ン欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5192646A true JPS5192646A (cs) 1976-08-13
JPS6037881B2 JPS6037881B2 (ja) 1985-08-29

Family

ID=11939905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50017292A Expired JPS6037881B2 (ja) 1975-02-10 1975-02-10 パタ−ン欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS6037881B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5338344U (cs) * 1976-09-08 1978-04-04

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499260U (cs) * 1972-04-24 1974-01-26

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS499260U (cs) * 1972-04-24 1974-01-26

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5338344U (cs) * 1976-09-08 1978-04-04

Also Published As

Publication number Publication date
JPS6037881B2 (ja) 1985-08-29

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