JPS5192178A - - Google Patents

Info

Publication number
JPS5192178A
JPS5192178A JP1769375A JP1769375A JPS5192178A JP S5192178 A JPS5192178 A JP S5192178A JP 1769375 A JP1769375 A JP 1769375A JP 1769375 A JP1769375 A JP 1769375A JP S5192178 A JPS5192178 A JP S5192178A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1769375A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1769375A priority Critical patent/JPS5192178A/ja
Publication of JPS5192178A publication Critical patent/JPS5192178A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP1769375A 1975-02-10 1975-02-10 Pending JPS5192178A (US06534493-20030318-C00166.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1769375A JPS5192178A (US06534493-20030318-C00166.png) 1975-02-10 1975-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1769375A JPS5192178A (US06534493-20030318-C00166.png) 1975-02-10 1975-02-10

Publications (1)

Publication Number Publication Date
JPS5192178A true JPS5192178A (US06534493-20030318-C00166.png) 1976-08-12

Family

ID=11950882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1769375A Pending JPS5192178A (US06534493-20030318-C00166.png) 1975-02-10 1975-02-10

Country Status (1)

Country Link
JP (1) JPS5192178A (US06534493-20030318-C00166.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62155515A (ja) * 1985-12-27 1987-07-10 Mitsubishi Electric Corp X線露光用マスクの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959576A (US06534493-20030318-C00166.png) * 1972-06-29 1974-06-10
JPS4959575A (US06534493-20030318-C00166.png) * 1972-06-29 1974-06-10

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4959576A (US06534493-20030318-C00166.png) * 1972-06-29 1974-06-10
JPS4959575A (US06534493-20030318-C00166.png) * 1972-06-29 1974-06-10

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62155515A (ja) * 1985-12-27 1987-07-10 Mitsubishi Electric Corp X線露光用マスクの製造方法
JPH0328047B2 (US06534493-20030318-C00166.png) * 1985-12-27 1991-04-17 Mitsubishi Electric Corp

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