JPS5191737A - - Google Patents

Info

Publication number
JPS5191737A
JPS5191737A JP1706875A JP1706875A JPS5191737A JP S5191737 A JPS5191737 A JP S5191737A JP 1706875 A JP1706875 A JP 1706875A JP 1706875 A JP1706875 A JP 1706875A JP S5191737 A JPS5191737 A JP S5191737A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1706875A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1706875A priority Critical patent/JPS5191737A/ja
Publication of JPS5191737A publication Critical patent/JPS5191737A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP1706875A 1975-02-10 1975-02-10 Pending JPS5191737A (US20110009641A1-20110113-C00116.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1706875A JPS5191737A (US20110009641A1-20110113-C00116.png) 1975-02-10 1975-02-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1706875A JPS5191737A (US20110009641A1-20110113-C00116.png) 1975-02-10 1975-02-10

Publications (1)

Publication Number Publication Date
JPS5191737A true JPS5191737A (US20110009641A1-20110113-C00116.png) 1976-08-11

Family

ID=11933658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1706875A Pending JPS5191737A (US20110009641A1-20110113-C00116.png) 1975-02-10 1975-02-10

Country Status (1)

Country Link
JP (1) JPS5191737A (US20110009641A1-20110113-C00116.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS572522A (en) * 1980-06-05 1982-01-07 Dainippon Printing Co Ltd Defect inspecting device for regular pattern
JPS58158921A (ja) * 1982-03-16 1983-09-21 Dainippon Printing Co Ltd 規則性パタ−ンの欠陥検査装置
JPS5965428A (ja) * 1982-10-06 1984-04-13 Hitachi Ltd 異物検査装置
JPH0510889A (ja) * 1991-10-28 1993-01-19 Hitachi Ltd 異物検査方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS572522A (en) * 1980-06-05 1982-01-07 Dainippon Printing Co Ltd Defect inspecting device for regular pattern
JPS632041B2 (US20110009641A1-20110113-C00116.png) * 1980-06-05 1988-01-16 Dainippon Printing Co Ltd
JPS58158921A (ja) * 1982-03-16 1983-09-21 Dainippon Printing Co Ltd 規則性パタ−ンの欠陥検査装置
JPS5965428A (ja) * 1982-10-06 1984-04-13 Hitachi Ltd 異物検査装置
JPH0430574B2 (US20110009641A1-20110113-C00116.png) * 1982-10-06 1992-05-22
JPH0510889A (ja) * 1991-10-28 1993-01-19 Hitachi Ltd 異物検査方法

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