JPS5161881A - Hyomenketsukankensasochi - Google Patents

Hyomenketsukankensasochi

Info

Publication number
JPS5161881A
JPS5161881A JP49136533A JP13653374A JPS5161881A JP S5161881 A JPS5161881 A JP S5161881A JP 49136533 A JP49136533 A JP 49136533A JP 13653374 A JP13653374 A JP 13653374A JP S5161881 A JPS5161881 A JP S5161881A
Authority
JP
Japan
Prior art keywords
hyomenketsukankensasochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49136533A
Other languages
English (en)
Other versions
JPS5250158B2 (ja
Inventor
Takahiko Inani
Mitsuhito Kamei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP49136533A priority Critical patent/JPS5161881A/ja
Publication of JPS5161881A publication Critical patent/JPS5161881A/ja
Publication of JPS5250158B2 publication Critical patent/JPS5250158B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Spinning Or Twisting Of Yarns (AREA)
JP49136533A 1974-11-26 1974-11-26 Hyomenketsukankensasochi Granted JPS5161881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49136533A JPS5161881A (en) 1974-11-26 1974-11-26 Hyomenketsukankensasochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49136533A JPS5161881A (en) 1974-11-26 1974-11-26 Hyomenketsukankensasochi

Publications (2)

Publication Number Publication Date
JPS5161881A true JPS5161881A (en) 1976-05-28
JPS5250158B2 JPS5250158B2 (ja) 1977-12-22

Family

ID=15177398

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49136533A Granted JPS5161881A (en) 1974-11-26 1974-11-26 Hyomenketsukankensasochi

Country Status (1)

Country Link
JP (1) JPS5161881A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213239A (ja) * 1982-06-07 1983-12-12 Asahi Chem Ind Co Ltd 複数本の線状体の欠陥検出方法
JP2014013154A (ja) * 2012-07-03 2014-01-23 Daido Steel Co Ltd 表面欠陥判定装置および表面欠陥判定方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58213239A (ja) * 1982-06-07 1983-12-12 Asahi Chem Ind Co Ltd 複数本の線状体の欠陥検出方法
JPH046899B2 (ja) * 1982-06-07 1992-02-07 Asahi Chemical Ind
JP2014013154A (ja) * 2012-07-03 2014-01-23 Daido Steel Co Ltd 表面欠陥判定装置および表面欠陥判定方法

Also Published As

Publication number Publication date
JPS5250158B2 (ja) 1977-12-22

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