JPS515694A - - Google Patents

Info

Publication number
JPS515694A
JPS515694A JP50063090A JP6309075A JPS515694A JP S515694 A JPS515694 A JP S515694A JP 50063090 A JP50063090 A JP 50063090A JP 6309075 A JP6309075 A JP 6309075A JP S515694 A JPS515694 A JP S515694A
Authority
JP
Japan
Prior art keywords
wire
over
grid
closed path
pulses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50063090A
Other languages
Japanese (ja)
Other versions
JPS5420396B2 (en
Inventor
Kei Dooran Samyueru
Eichi Paakinsu Maarin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of JPS515694A publication Critical patent/JPS515694A/ja
Publication of JPS5420396B2 publication Critical patent/JPS5420396B2/ja
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/21Means for adjusting the focus
    • EFIXED CONSTRUCTIONS
    • E01CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01CCONSTRUCTION OF, OR SURFACES FOR, ROADS, SPORTS GROUNDS, OR THE LIKE; MACHINES OR AUXILIARY TOOLS FOR CONSTRUCTION OR REPAIR
    • E01C11/00Details of pavings
    • E01C11/24Methods or arrangements for preventing slipperiness or protecting against influences of the weather
    • E01C11/26Permanently installed heating or blowing devices ; Mounting thereof
    • E01C11/265Embedded electrical heating elements ; Mounting thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/244Detectors; Associated components or circuits therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/20Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
    • H05B3/34Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater flexible, e.g. heating nets or webs
    • H05B3/36Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater flexible, e.g. heating nets or webs heating conductor embedded in insulating material
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00Ohmic-resistance heating
    • H05B3/40Heating elements having the shape of rods or tubes
    • H05B3/54Heating elements having the shape of rods or tubes flexible
    • H05B3/56Heating cables
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245Detection characterised by the variable being measured
    • H01J2237/24571Measurements of non-electric or non-magnetic variables
    • H01J2237/24578Spatial variables, e.g. position, distance
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/002Heaters using a particular layout for the resistive material or resistive elements
    • H05B2203/003Heaters using a particular layout for the resistive material or resistive elements using serpentine layout
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/017Manufacturing methods or apparatus for heaters
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05BELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B2203/00Aspects relating to Ohmic resistive heating covered by group H05B3/00
    • H05B2203/026Heaters specially adapted for floor heating

Abstract

A beam of charged particles is deflected in a closed path such as a square, for example, over a cross wire grid at a constant velocity by an X Y deflection system. A small high frequency jitter is added at both axes of deflection to cause oscillation of the beam at 45 DEG to the X and Y axes. From the time that the leading edge of the oscillating beam passes over the wire until the trailing edge of the beam passes over the wire, an envelope of the oscillations produced by the jitter is obtained. A second envelope is obtained when the leading edge of the beam exits from being over the wire until the trailing edge of the beam ceases to be over the wire. Thus, a pair of envelopes is produced as the beam passes over each wire of the grid. The number of pulses exceeding ten per cent of the peak voltage in the eight envelopes produced by the beam completing a cycle in its closed path around the grid are counted and compared with those counted during the previous cycle of the beam moving in its closed path over the grid. As the number of pulses decreases, the quality of the focus of the beam increases so that correction signals are applied to the focus coil in accordance with whether the number of pulses is increasing or decreasing.
JP6309075A 1974-06-26 1975-05-28 Expired JPS5420396B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US483266A US3924156A (en) 1974-06-26 1974-06-26 Method and system for correcting an aberration of a beam of charged particles

Publications (2)

Publication Number Publication Date
JPS515694A true JPS515694A (en) 1976-01-17
JPS5420396B2 JPS5420396B2 (en) 1979-07-23

Family

ID=23919393

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6309075A Expired JPS5420396B2 (en) 1974-06-26 1975-05-28

Country Status (8)

Country Link
US (1) US3924156A (en)
JP (1) JPS5420396B2 (en)
DE (1) DE2521591C3 (en)
FR (1) FR2276625A1 (en)
GB (1) GB1505363A (en)
IT (1) IT1038110B (en)
NL (1) NL178732C (en)
SE (1) SE398415B (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5444824A (en) * 1977-09-16 1979-04-09 Victor Co Of Japan Ltd Stabilizer circuit for focusing of pickup tube of electromagnetic focusing type
US4137459A (en) * 1978-02-13 1979-01-30 International Business Machines Corporation Method and apparatus for applying focus correction in E-beam system
DE2937004C2 (en) * 1979-09-13 1984-11-08 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 8000 München Chromatically corrected deflection device for corpuscular beam devices
US6864493B2 (en) * 2001-05-30 2005-03-08 Hitachi, Ltd. Charged particle beam alignment method and charged particle beam apparatus
US6533721B1 (en) * 2001-07-27 2003-03-18 Stryker Corporation Endoscopic camera system with automatic non-mechanical focus
US10056224B2 (en) * 2015-08-10 2018-08-21 Kla-Tencor Corporation Method and system for edge-of-wafer inspection and review

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3588586A (en) * 1968-04-26 1971-06-28 Jeol Ltd Apparatus for correcting electron beam deflection
DE1948153A1 (en) * 1969-09-23 1971-04-01 Siemens Ag Electron beam tube as a writing tube

Also Published As

Publication number Publication date
NL178732C (en) 1986-05-01
GB1505363A (en) 1978-03-30
FR2276625A1 (en) 1976-01-23
SE398415B (en) 1977-12-19
JPS5420396B2 (en) 1979-07-23
DE2521591C3 (en) 1979-02-01
DE2521591A1 (en) 1976-01-15
AU8138075A (en) 1976-11-25
US3924156A (en) 1975-12-02
DE2521591B2 (en) 1978-05-03
SE7507109L (en) 1975-12-29
FR2276625B1 (en) 1977-04-15
NL178732B (en) 1985-12-02
NL7507428A (en) 1975-12-30
IT1038110B (en) 1979-11-20

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