JPS5137837B2 - - Google Patents

Info

Publication number
JPS5137837B2
JPS5137837B2 JP47113026A JP11302672A JPS5137837B2 JP S5137837 B2 JPS5137837 B2 JP S5137837B2 JP 47113026 A JP47113026 A JP 47113026A JP 11302672 A JP11302672 A JP 11302672A JP S5137837 B2 JPS5137837 B2 JP S5137837B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47113026A
Other languages
Japanese (ja)
Other versions
JPS4972184A (US20110009641A1-20110113-C00116.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47113026A priority Critical patent/JPS5137837B2/ja
Publication of JPS4972184A publication Critical patent/JPS4972184A/ja
Publication of JPS5137837B2 publication Critical patent/JPS5137837B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47113026A 1972-11-13 1972-11-13 Expired JPS5137837B2 (US20110009641A1-20110113-C00116.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47113026A JPS5137837B2 (US20110009641A1-20110113-C00116.png) 1972-11-13 1972-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47113026A JPS5137837B2 (US20110009641A1-20110113-C00116.png) 1972-11-13 1972-11-13

Publications (2)

Publication Number Publication Date
JPS4972184A JPS4972184A (US20110009641A1-20110113-C00116.png) 1974-07-12
JPS5137837B2 true JPS5137837B2 (US20110009641A1-20110113-C00116.png) 1976-10-18

Family

ID=14601570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47113026A Expired JPS5137837B2 (US20110009641A1-20110113-C00116.png) 1972-11-13 1972-11-13

Country Status (1)

Country Link
JP (1) JPS5137837B2 (US20110009641A1-20110113-C00116.png)

Also Published As

Publication number Publication date
JPS4972184A (US20110009641A1-20110113-C00116.png) 1974-07-12

Similar Documents

Publication Publication Date Title
JPS5621979B2 (US20110009641A1-20110113-C00116.png)
FR2204648A1 (US20110009641A1-20110113-C00116.png)
JPS5126154B2 (US20110009641A1-20110113-C00116.png)
FR2217348B1 (US20110009641A1-20110113-C00116.png)
JPS4910433A (US20110009641A1-20110113-C00116.png)
CS162799B2 (US20110009641A1-20110113-C00116.png)
CS163294B2 (US20110009641A1-20110113-C00116.png)
JPS5045081Y2 (US20110009641A1-20110113-C00116.png)
FR2171198B3 (US20110009641A1-20110113-C00116.png)
JPS4895423U (US20110009641A1-20110113-C00116.png)
JPS5221105Y2 (US20110009641A1-20110113-C00116.png)
FR2191504A5 (US20110009641A1-20110113-C00116.png)
JPS5137837B2 (US20110009641A1-20110113-C00116.png)
CS159520B1 (US20110009641A1-20110113-C00116.png)
CS153959B1 (US20110009641A1-20110113-C00116.png)
CS158828B1 (US20110009641A1-20110113-C00116.png)
CS158470B1 (US20110009641A1-20110113-C00116.png)
CS153905B1 (US20110009641A1-20110113-C00116.png)
CS168625B2 (US20110009641A1-20110113-C00116.png)
CS166323B1 (US20110009641A1-20110113-C00116.png)
CS166166B2 (US20110009641A1-20110113-C00116.png)
CS165665B1 (US20110009641A1-20110113-C00116.png)
CS163905B1 (US20110009641A1-20110113-C00116.png)
CS154521B1 (US20110009641A1-20110113-C00116.png)
CS154842B1 (US20110009641A1-20110113-C00116.png)