JPS5131187A - - Google Patents

Info

Publication number
JPS5131187A
JPS5131187A JP49103915A JP10391574A JPS5131187A JP S5131187 A JPS5131187 A JP S5131187A JP 49103915 A JP49103915 A JP 49103915A JP 10391574 A JP10391574 A JP 10391574A JP S5131187 A JPS5131187 A JP S5131187A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49103915A
Other languages
Japanese (ja)
Other versions
JPS583376B2 (ja
Inventor
Kazuyoshi Ueki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP49103915A priority Critical patent/JPS583376B2/ja
Publication of JPS5131187A publication Critical patent/JPS5131187A/ja
Publication of JPS583376B2 publication Critical patent/JPS583376B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP49103915A 1974-09-11 1974-09-11 ハンドウタイソシノセイゾウホウホウ Expired JPS583376B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49103915A JPS583376B2 (ja) 1974-09-11 1974-09-11 ハンドウタイソシノセイゾウホウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49103915A JPS583376B2 (ja) 1974-09-11 1974-09-11 ハンドウタイソシノセイゾウホウホウ

Publications (2)

Publication Number Publication Date
JPS5131187A true JPS5131187A (cs) 1976-03-17
JPS583376B2 JPS583376B2 (ja) 1983-01-21

Family

ID=14366708

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49103915A Expired JPS583376B2 (ja) 1974-09-11 1974-09-11 ハンドウタイソシノセイゾウホウホウ

Country Status (1)

Country Link
JP (1) JPS583376B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627140A (ja) * 1985-07-03 1987-01-14 Agency Of Ind Science & Technol 導電薄膜の堆積方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494583A (cs) * 1972-04-25 1974-01-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS494583A (cs) * 1972-04-25 1974-01-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627140A (ja) * 1985-07-03 1987-01-14 Agency Of Ind Science & Technol 導電薄膜の堆積方法

Also Published As

Publication number Publication date
JPS583376B2 (ja) 1983-01-21

Similar Documents

Publication Publication Date Title
AU485556B2 (cs)
AU7138274A (cs)
AU7465674A (cs)
BG20224A1 (cs)
BG20062A1 (cs)
AU479802A (cs)
AU480070A (cs)
AU481119A (cs)
AU481340A (cs)
AU481375A (cs)
AU481639A (cs)
AU482149A (cs)
AU482308A (cs)
BE829579A (cs)
BE830261A (cs)
BE837371A (cs)
BG19453A1 (cs)
BG19488A1 (cs)
BG19564A1 (cs)
BG19639A1 (cs)
BG19665A1 (cs)
BG19739A1 (cs)
BG19813A1 (cs)
BG19819A1 (cs)
BG19825A1 (cs)