JPS5120356B2 - - Google Patents
Info
- Publication number
- JPS5120356B2 JPS5120356B2 JP47067232A JP6723272A JPS5120356B2 JP S5120356 B2 JPS5120356 B2 JP S5120356B2 JP 47067232 A JP47067232 A JP 47067232A JP 6723272 A JP6723272 A JP 6723272A JP S5120356 B2 JPS5120356 B2 JP S5120356B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Surface Treatment Of Glass (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47067232A JPS5120356B2 (en) | 1972-07-04 | 1972-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47067232A JPS5120356B2 (en) | 1972-07-04 | 1972-07-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4926182A JPS4926182A (en) | 1974-03-08 |
| JPS5120356B2 true JPS5120356B2 (en) | 1976-06-24 |
Family
ID=13338948
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47067232A Expired JPS5120356B2 (en) | 1972-07-04 | 1972-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5120356B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5315837B2 (en) * | 1974-04-16 | 1978-05-27 | ||
| JPH03232963A (en) * | 1990-02-08 | 1991-10-16 | Nippon Steel Corp | Method for coating with ceramics film |
| US7211461B2 (en) | 2003-02-14 | 2007-05-01 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing apparatus |
-
1972
- 1972-07-04 JP JP47067232A patent/JPS5120356B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4926182A (en) | 1974-03-08 |