JPS5117454U - - Google Patents
Info
- Publication number
- JPS5117454U JPS5117454U JP8902074U JP8902074U JPS5117454U JP S5117454 U JPS5117454 U JP S5117454U JP 8902074 U JP8902074 U JP 8902074U JP 8902074 U JP8902074 U JP 8902074U JP S5117454 U JPS5117454 U JP S5117454U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974089020U JPS5444537Y2 (https=) | 1974-07-26 | 1974-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974089020U JPS5444537Y2 (https=) | 1974-07-26 | 1974-07-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5117454U true JPS5117454U (https=) | 1976-02-07 |
| JPS5444537Y2 JPS5444537Y2 (https=) | 1979-12-21 |
Family
ID=28274648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974089020U Expired JPS5444537Y2 (https=) | 1974-07-26 | 1974-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5444537Y2 (https=) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5351171U (https=) * | 1976-10-05 | 1978-05-01 | ||
| JPS5366158U (https=) * | 1976-11-08 | 1978-06-03 | ||
| JPS59161262U (ja) * | 1983-04-14 | 1984-10-29 | 日本電子株式会社 | 絞り移動装置 |
| JP2015210998A (ja) * | 2014-04-30 | 2015-11-24 | 株式会社ホロン | 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置 |
| JPWO2019186937A1 (ja) * | 2018-03-29 | 2021-02-25 | 株式会社日立ハイテク | 荷電粒子線装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4849376A (https=) * | 1971-10-22 | 1973-07-12 |
-
1974
- 1974-07-26 JP JP1974089020U patent/JPS5444537Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4849376A (https=) * | 1971-10-22 | 1973-07-12 |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5351171U (https=) * | 1976-10-05 | 1978-05-01 | ||
| JPS5366158U (https=) * | 1976-11-08 | 1978-06-03 | ||
| JPS59161262U (ja) * | 1983-04-14 | 1984-10-29 | 日本電子株式会社 | 絞り移動装置 |
| JP2015210998A (ja) * | 2014-04-30 | 2015-11-24 | 株式会社ホロン | 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置 |
| JPWO2019186937A1 (ja) * | 2018-03-29 | 2021-02-25 | 株式会社日立ハイテク | 荷電粒子線装置 |
| US11335532B2 (en) | 2018-03-29 | 2022-05-17 | Hitachi High-Tech Corporation | Charged particle beam device |
| US11817289B2 (en) | 2018-03-29 | 2023-11-14 | Hitachi High-Tech Corporation | Charged particle beam device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5444537Y2 (https=) | 1979-12-21 |