JPS51148364A - Mask defect detection method - Google Patents

Mask defect detection method

Info

Publication number
JPS51148364A
JPS51148364A JP7257375A JP7257375A JPS51148364A JP S51148364 A JPS51148364 A JP S51148364A JP 7257375 A JP7257375 A JP 7257375A JP 7257375 A JP7257375 A JP 7257375A JP S51148364 A JPS51148364 A JP S51148364A
Authority
JP
Japan
Prior art keywords
detection method
defect detection
mask defect
mask
metal layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7257375A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5714022B2 (enrdf_load_stackoverflow
Inventor
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP7257375A priority Critical patent/JPS51148364A/ja
Publication of JPS51148364A publication Critical patent/JPS51148364A/ja
Publication of JPS5714022B2 publication Critical patent/JPS5714022B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP7257375A 1975-06-14 1975-06-14 Mask defect detection method Granted JPS51148364A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7257375A JPS51148364A (en) 1975-06-14 1975-06-14 Mask defect detection method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7257375A JPS51148364A (en) 1975-06-14 1975-06-14 Mask defect detection method

Publications (2)

Publication Number Publication Date
JPS51148364A true JPS51148364A (en) 1976-12-20
JPS5714022B2 JPS5714022B2 (enrdf_load_stackoverflow) 1982-03-20

Family

ID=13493242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7257375A Granted JPS51148364A (en) 1975-06-14 1975-06-14 Mask defect detection method

Country Status (1)

Country Link
JP (1) JPS51148364A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5714022B2 (enrdf_load_stackoverflow) 1982-03-20

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