JPS51147151A - Pattern angle detector - Google Patents

Pattern angle detector

Info

Publication number
JPS51147151A
JPS51147151A JP50071064A JP7106475A JPS51147151A JP S51147151 A JPS51147151 A JP S51147151A JP 50071064 A JP50071064 A JP 50071064A JP 7106475 A JP7106475 A JP 7106475A JP S51147151 A JPS51147151 A JP S51147151A
Authority
JP
Japan
Prior art keywords
angle detector
pattern angle
pattern
detector
easy detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50071064A
Other languages
Japanese (ja)
Other versions
JPS5637587B2 (en
Inventor
Kunihiko Edamatsu
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP7106475A priority Critical patent/JPS5637587B2/ja
Publication of JPS51147151A publication Critical patent/JPS51147151A/en
Publication of JPS5637587B2 publication Critical patent/JPS5637587B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: Easy detection of pattern angle.
COPYRIGHT: (C)1976,JPO&Japio
JP7106475A 1975-06-12 1975-06-12 Expired JPS5637587B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7106475A JPS5637587B2 (en) 1975-06-12 1975-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7106475A JPS5637587B2 (en) 1975-06-12 1975-06-12

Publications (2)

Publication Number Publication Date
JPS51147151A true JPS51147151A (en) 1976-12-17
JPS5637587B2 JPS5637587B2 (en) 1981-09-01

Family

ID=13449712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7106475A Expired JPS5637587B2 (en) 1975-06-12 1975-06-12

Country Status (1)

Country Link
JP (1) JPS5637587B2 (en)

Also Published As

Publication number Publication date
JPS5637587B2 (en) 1981-09-01

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