JPS51143991A - Parts supplying device in ion beam machining - Google Patents

Parts supplying device in ion beam machining

Info

Publication number
JPS51143991A
JPS51143991A JP6204175A JP6204175A JPS51143991A JP S51143991 A JPS51143991 A JP S51143991A JP 6204175 A JP6204175 A JP 6204175A JP 6204175 A JP6204175 A JP 6204175A JP S51143991 A JPS51143991 A JP S51143991A
Authority
JP
Japan
Prior art keywords
ion beam
supplying device
beam machining
parts supplying
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6204175A
Other languages
Japanese (ja)
Other versions
JPS5422639B2 (en
Inventor
Konsutanteinoobuna Zaitsu Aita
Gurigoriebitsuchi Jiyu Ebugeni
Yakoburebitsuchi Jipinet Naumu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP6204175A priority Critical patent/JPS51143991A/en
Publication of JPS51143991A publication Critical patent/JPS51143991A/en
Publication of JPS5422639B2 publication Critical patent/JPS5422639B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Drying Of Semiconductors (AREA)
JP6204175A 1975-05-26 1975-05-26 Parts supplying device in ion beam machining Granted JPS51143991A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6204175A JPS51143991A (en) 1975-05-26 1975-05-26 Parts supplying device in ion beam machining

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6204175A JPS51143991A (en) 1975-05-26 1975-05-26 Parts supplying device in ion beam machining

Publications (2)

Publication Number Publication Date
JPS51143991A true JPS51143991A (en) 1976-12-10
JPS5422639B2 JPS5422639B2 (en) 1979-08-08

Family

ID=13188673

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6204175A Granted JPS51143991A (en) 1975-05-26 1975-05-26 Parts supplying device in ion beam machining

Country Status (1)

Country Link
JP (1) JPS51143991A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539680A (en) * 1978-09-14 1980-03-19 Toshiba Corp Ion implantation device
JP2022529606A (en) * 2019-04-16 2022-06-23 アクセリス テクノロジーズ， インコーポレイテッド Ion source with multiple arc chambers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5539680A (en) * 1978-09-14 1980-03-19 Toshiba Corp Ion implantation device
JP2022529606A (en) * 2019-04-16 2022-06-23 アクセリス テクノロジーズ， インコーポレイテッド Ion source with multiple arc chambers

Also Published As

Publication number Publication date
JPS5422639B2 (en) 1979-08-08

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