JPS51130169A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS51130169A
JPS51130169A JP5571875A JP5571875A JPS51130169A JP S51130169 A JPS51130169 A JP S51130169A JP 5571875 A JP5571875 A JP 5571875A JP 5571875 A JP5571875 A JP 5571875A JP S51130169 A JPS51130169 A JP S51130169A
Authority
JP
Japan
Prior art keywords
semiconductor device
junction
formation
shallow
matching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5571875A
Other languages
English (en)
Other versions
JPS6032349B2 (ja
Inventor
Kunio Nakamura
Mototaka Kamoshita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP5571875A priority Critical patent/JPS6032349B2/ja
Publication of JPS51130169A publication Critical patent/JPS51130169A/ja
Publication of JPS6032349B2 publication Critical patent/JPS6032349B2/ja
Expired legal-status Critical Current

Links

JP5571875A 1975-05-07 1975-05-07 半導体装置の製造方法 Expired JPS6032349B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5571875A JPS6032349B2 (ja) 1975-05-07 1975-05-07 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5571875A JPS6032349B2 (ja) 1975-05-07 1975-05-07 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS51130169A true JPS51130169A (en) 1976-11-12
JPS6032349B2 JPS6032349B2 (ja) 1985-07-27

Family

ID=13006641

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5571875A Expired JPS6032349B2 (ja) 1975-05-07 1975-05-07 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS6032349B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893222A (ja) * 1981-11-30 1983-06-02 Toshiba Corp 半導体単結晶膜の製造方法
JPS61174768A (ja) * 1985-01-30 1986-08-06 Nec Corp 半導体装置
JPS62126632A (ja) * 1985-11-27 1987-06-08 Toshiba Corp 半導体装置の製造方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5893222A (ja) * 1981-11-30 1983-06-02 Toshiba Corp 半導体単結晶膜の製造方法
JPH0332208B2 (ja) * 1981-11-30 1991-05-10 Tokyo Shibaura Electric Co
JPS61174768A (ja) * 1985-01-30 1986-08-06 Nec Corp 半導体装置
JPH0533544B2 (ja) * 1985-01-30 1993-05-19 Nippon Electric Co
JPS62126632A (ja) * 1985-11-27 1987-06-08 Toshiba Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6032349B2 (ja) 1985-07-27

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