JPS51126078A - Manufacturing method of semi-conductor equpment - Google Patents

Manufacturing method of semi-conductor equpment

Info

Publication number
JPS51126078A
JPS51126078A JP4969975A JP4969975A JPS51126078A JP S51126078 A JPS51126078 A JP S51126078A JP 4969975 A JP4969975 A JP 4969975A JP 4969975 A JP4969975 A JP 4969975A JP S51126078 A JPS51126078 A JP S51126078A
Authority
JP
Japan
Prior art keywords
conductor
semi
equpment
manufacturing
protects
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4969975A
Other languages
Japanese (ja)
Inventor
Yukio Sasaki
Hideo Sakai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4969975A priority Critical patent/JPS51126078A/en
Publication of JPS51126078A publication Critical patent/JPS51126078A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a semi-conductor that protects the step cutting of the isolation film and the breaking of the wires and also making the bad head smaller.
COPYRIGHT: (C)1976,JPO&Japio
JP4969975A 1975-04-25 1975-04-25 Manufacturing method of semi-conductor equpment Pending JPS51126078A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4969975A JPS51126078A (en) 1975-04-25 1975-04-25 Manufacturing method of semi-conductor equpment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4969975A JPS51126078A (en) 1975-04-25 1975-04-25 Manufacturing method of semi-conductor equpment

Publications (1)

Publication Number Publication Date
JPS51126078A true JPS51126078A (en) 1976-11-02

Family

ID=12838418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4969975A Pending JPS51126078A (en) 1975-04-25 1975-04-25 Manufacturing method of semi-conductor equpment

Country Status (1)

Country Link
JP (1) JPS51126078A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5470783A (en) * 1977-11-16 1979-06-06 Mitsubishi Electric Corp Forming method for separate oxide film of semiconductor device
JPS61244032A (en) * 1985-04-22 1986-10-30 Sony Corp Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5470783A (en) * 1977-11-16 1979-06-06 Mitsubishi Electric Corp Forming method for separate oxide film of semiconductor device
JPS61244032A (en) * 1985-04-22 1986-10-30 Sony Corp Manufacture of semiconductor device

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