JPS51122464A - Measuring apparatus - Google Patents

Measuring apparatus

Info

Publication number
JPS51122464A
JPS51122464A JP51039116A JP3911676A JPS51122464A JP S51122464 A JPS51122464 A JP S51122464A JP 51039116 A JP51039116 A JP 51039116A JP 3911676 A JP3911676 A JP 3911676A JP S51122464 A JPS51122464 A JP S51122464A
Authority
JP
Japan
Prior art keywords
measuring apparatus
measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP51039116A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6149602B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Shii Hantaa Jiyooji
Ei Zanoni Kaaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of JPS51122464A publication Critical patent/JPS51122464A/ja
Publication of JPS6149602B2 publication Critical patent/JPS6149602B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP51039116A 1975-04-07 1976-04-07 Measuring apparatus Granted JPS51122464A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/565,525 US3977789A (en) 1975-04-07 1975-04-07 Scanning differential photoelectric autocollimator

Publications (2)

Publication Number Publication Date
JPS51122464A true JPS51122464A (en) 1976-10-26
JPS6149602B2 JPS6149602B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-30

Family

ID=24259011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51039116A Granted JPS51122464A (en) 1975-04-07 1976-04-07 Measuring apparatus

Country Status (2)

Country Link
US (1) US3977789A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS51122464A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105728U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-01-11 1980-07-24
JPS63229305A (ja) * 1987-03-18 1988-09-26 Nikon Corp パタ−ン検出装置

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4097751A (en) * 1976-09-24 1978-06-27 Grumman Aerospace Corporation Retroreflectance measuring apparatus
US4272190A (en) * 1978-08-14 1981-06-09 Typalogics Optical measuring system
IT1108255B (it) * 1978-10-24 1985-12-02 Fiat Spa Procedimento e dispositivo per il controllo della rugosita della superficie di un pezzo che ha subito una lavorazione meccanica
US4286293A (en) * 1979-05-30 1981-08-25 Western Electric Company, Inc. Laser scanning and multiple detection for video image processing
US4269518A (en) * 1979-06-18 1981-05-26 The United States Of America As Represented By The Secretary Of The Navy Stray light eliminator in a scatterometer
US4236821A (en) * 1979-08-10 1980-12-02 Mchenry Systems, Inc. Method and apparatus for testing optical retrodirective prisms
US4391515A (en) * 1981-05-07 1983-07-05 The United States Of America As Represented By The Secretary Of The Navy Optical transmitter/receiver apparatus sharing common optics
DE3233013A1 (de) * 1982-09-06 1984-03-08 Siemens AG, 1000 Berlin und 8000 München Optische anordnung zur erkennung und auswertung der lage eines objekts
US4523842A (en) * 1983-03-18 1985-06-18 The United States Of America As Represented By The Secretary Of The Navy Asperic surface test fixture
FR2548796B1 (fr) * 1983-07-08 1985-11-22 Comp Generale Electricite Dispositif optique pour determiner la position et la forme de la surface d'un objet
JPS629211A (ja) * 1985-07-05 1987-01-17 Matsushita Electric Ind Co Ltd 光学測定装置
US4725144A (en) * 1986-02-25 1988-02-16 R & D Associates Optic element testing method and apparatus
DE3620146A1 (de) * 1986-06-14 1987-12-17 Zeiss Carl Fa Verfahren zum pruefen von bauteilen aus transparentem material auf oberflaechenfehler und einschluesse
US5015096A (en) * 1986-10-10 1991-05-14 Kowalski Frank V Method and apparatus for testing optical components
US4795260A (en) * 1987-05-15 1989-01-03 Therma-Wave, Inc. Apparatus for locating and testing areas of interest on a workpiece
US5122672A (en) * 1990-09-07 1992-06-16 Ford Motor Company Surface quality analyzer apparatus and method
US5489985A (en) * 1993-01-21 1996-02-06 Matsushita Electric Industrial Co., Ltd. Apparatus for inspection of packaged printed circuit boards
US5291273A (en) * 1993-04-19 1994-03-01 Creo Products Inc. Non-contact diameter measuring method and apparatus
US5864396A (en) * 1998-05-26 1999-01-26 Hach Company Color comparator system
US10670391B2 (en) 2018-10-26 2020-06-02 Northrop Grumman Systems Corporation Confocal optical protractor
US11555891B2 (en) 2019-05-21 2023-01-17 Northrop Grumman Systems Corporation Methods for large angle field of view scanning LIDAR with no movable parts
US11448732B2 (en) 2019-05-21 2022-09-20 Northrop Grumman Systems Corporation Frequency modulated scanning LIDAR with 360 degrees field of view
US11531111B2 (en) 2019-05-21 2022-12-20 Northrop Grumman Systems Corporation 360 degrees field of view scanning lidar with no movable parts
DE102020201976B4 (de) 2020-02-18 2022-04-28 Hochschule Bremen Körperschaft des öffentlichen Rechts Vorrichtung und Verfahren zur optischen Analyse eines reflektierenden Prüflings

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3761179A (en) * 1971-08-26 1973-09-25 Polaroid Corp Mirror testing apparatus
US3885875A (en) * 1974-07-29 1975-05-27 Zygo Corp Noncontact surface profilometer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105728U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-01-11 1980-07-24
JPS63229305A (ja) * 1987-03-18 1988-09-26 Nikon Corp パタ−ン検出装置

Also Published As

Publication number Publication date
JPS6149602B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-10-30
US3977789A (en) 1976-08-31

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