Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Steel Corp
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Steel Corp
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Steel Corp, Nippon Telegraph and Telephone CorpfiledCriticalJeol Ltd
Priority to JP4049275ApriorityCriticalpatent/JPS51115206A/ja
Publication of JPS51115206ApublicationCriticalpatent/JPS51115206A/ja
Publication of JPS5246522B2publicationCriticalpatent/JPS5246522B2/ja