JPS51114455U - - Google Patents

Info

Publication number
JPS51114455U
JPS51114455U JP3342875U JP3342875U JPS51114455U JP S51114455 U JPS51114455 U JP S51114455U JP 3342875 U JP3342875 U JP 3342875U JP 3342875 U JP3342875 U JP 3342875U JP S51114455 U JPS51114455 U JP S51114455U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3342875U
Other languages
Japanese (ja)
Other versions
JPS5421562Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3342875U priority Critical patent/JPS5421562Y2/ja
Publication of JPS51114455U publication Critical patent/JPS51114455U/ja
Application granted granted Critical
Publication of JPS5421562Y2 publication Critical patent/JPS5421562Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3342875U 1975-03-14 1975-03-14 Expired JPS5421562Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3342875U JPS5421562Y2 (enrdf_load_stackoverflow) 1975-03-14 1975-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3342875U JPS5421562Y2 (enrdf_load_stackoverflow) 1975-03-14 1975-03-14

Publications (2)

Publication Number Publication Date
JPS51114455U true JPS51114455U (enrdf_load_stackoverflow) 1976-09-17
JPS5421562Y2 JPS5421562Y2 (enrdf_load_stackoverflow) 1979-07-31

Family

ID=28146325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3342875U Expired JPS5421562Y2 (enrdf_load_stackoverflow) 1975-03-14 1975-03-14

Country Status (1)

Country Link
JP (1) JPS5421562Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS5421562Y2 (enrdf_load_stackoverflow) 1979-07-31

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