JPS51106640A - Ionpureeteingusochi - Google Patents

Ionpureeteingusochi

Info

Publication number
JPS51106640A
JPS51106640A JP50032032A JP3203275A JPS51106640A JP S51106640 A JPS51106640 A JP S51106640A JP 50032032 A JP50032032 A JP 50032032A JP 3203275 A JP3203275 A JP 3203275A JP S51106640 A JPS51106640 A JP S51106640A
Authority
JP
Japan
Prior art keywords
ionpureeteingusochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50032032A
Other languages
English (en)
Japanese (ja)
Other versions
JPS589155B2 (ja
Inventor
Koichi Shinohara
Yasuhiro Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3203275A priority Critical patent/JPS589155B2/ja
Publication of JPS51106640A publication Critical patent/JPS51106640A/ja
Publication of JPS589155B2 publication Critical patent/JPS589155B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3203275A 1975-03-17 1975-03-17 イオンプレ−テイングソウチ Expired JPS589155B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3203275A JPS589155B2 (ja) 1975-03-17 1975-03-17 イオンプレ−テイングソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3203275A JPS589155B2 (ja) 1975-03-17 1975-03-17 イオンプレ−テイングソウチ

Publications (2)

Publication Number Publication Date
JPS51106640A true JPS51106640A (en) 1976-09-21
JPS589155B2 JPS589155B2 (ja) 1983-02-19

Family

ID=12347518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3203275A Expired JPS589155B2 (ja) 1975-03-17 1975-03-17 イオンプレ−テイングソウチ

Country Status (1)

Country Link
JP (1) JPS589155B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106244985A (zh) * 2016-09-22 2016-12-21 铜陵市铜创电子科技有限公司 一种金属化薄膜加工用镀膜机构

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0383555U (enrdf_load_stackoverflow) * 1989-12-18 1991-08-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106244985A (zh) * 2016-09-22 2016-12-21 铜陵市铜创电子科技有限公司 一种金属化薄膜加工用镀膜机构
CN106244985B (zh) * 2016-09-22 2019-01-11 铜陵市铜创电子科技有限公司 一种金属化薄膜加工用镀膜机构

Also Published As

Publication number Publication date
JPS589155B2 (ja) 1983-02-19

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