JPS5096182A - - Google Patents

Info

Publication number
JPS5096182A
JPS5096182A JP221674A JP221674A JPS5096182A JP S5096182 A JPS5096182 A JP S5096182A JP 221674 A JP221674 A JP 221674A JP 221674 A JP221674 A JP 221674A JP S5096182 A JPS5096182 A JP S5096182A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP221674A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP221674A priority Critical patent/JPS5096182A/ja
Publication of JPS5096182A publication Critical patent/JPS5096182A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP221674A 1973-12-24 1973-12-24 Pending JPS5096182A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP221674A JPS5096182A (cs) 1973-12-24 1973-12-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP221674A JPS5096182A (cs) 1973-12-24 1973-12-24

Publications (1)

Publication Number Publication Date
JPS5096182A true JPS5096182A (cs) 1975-07-31

Family

ID=11523149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP221674A Pending JPS5096182A (cs) 1973-12-24 1973-12-24

Country Status (1)

Country Link
JP (1) JPS5096182A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271171A (en) * 1975-12-10 1977-06-14 Matsushita Electronics Corp Production of epitaxial wafer
JPH04299832A (ja) * 1991-03-28 1992-10-23 Ngk Insulators Ltd 半導体ウエハー加熱装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS445158Y1 (cs) * 1965-09-22 1969-02-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS445158Y1 (cs) * 1965-09-22 1969-02-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271171A (en) * 1975-12-10 1977-06-14 Matsushita Electronics Corp Production of epitaxial wafer
JPH04299832A (ja) * 1991-03-28 1992-10-23 Ngk Insulators Ltd 半導体ウエハー加熱装置

Similar Documents

Publication Publication Date Title
AR201235Q (cs)
AR201231Q (cs)
AU450229B2 (cs)
AR201229Q (cs)
AR199451A1 (cs)
JPS5096182A (cs)
AU477823B2 (cs)
AR195311A1 (cs)
AU447540B2 (cs)
AR196382A1 (cs)
AR195948A1 (cs)
AR201432A1 (cs)
AR193950A1 (cs)
AR200256A1 (cs)
AR200885A1 (cs)
AU1891376A (cs)
AR196212Q (cs)
AR196123Q (cs)
CH562519A5 (cs)
AU479420A (cs)
BG19510A1 (cs)
BG19288A1 (cs)
AU480894A (cs)
AU479562A (cs)
AU479539A (cs)