JPS5084472A - - Google Patents
Info
- Publication number
- JPS5084472A JPS5084472A JP13516273A JP13516273A JPS5084472A JP S5084472 A JPS5084472 A JP S5084472A JP 13516273 A JP13516273 A JP 13516273A JP 13516273 A JP13516273 A JP 13516273A JP S5084472 A JPS5084472 A JP S5084472A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13516273A JPS535871B2 (ja) | 1973-11-30 | 1973-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13516273A JPS535871B2 (ja) | 1973-11-30 | 1973-11-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5084472A true JPS5084472A (ja) | 1975-07-08 |
| JPS535871B2 JPS535871B2 (ja) | 1978-03-02 |
Family
ID=15145260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13516273A Expired JPS535871B2 (ja) | 1973-11-30 | 1973-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS535871B2 (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5227076A (en) * | 1975-08-27 | 1977-03-01 | Seiko Instr & Electronics Ltd | Equipment for ionic plating |
| JPS54100988A (en) * | 1978-01-27 | 1979-08-09 | Agency Of Ind Science & Technol | Ion plating device |
| JPS63109162A (ja) * | 1986-10-24 | 1988-05-13 | Res Dev Corp Of Japan | イオンプレ−テイング方法とその装置 |
| US4974544A (en) * | 1986-10-07 | 1990-12-04 | Ricoh Company, Co. | Vapor deposition apparatus |
-
1973
- 1973-11-30 JP JP13516273A patent/JPS535871B2/ja not_active Expired
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5227076A (en) * | 1975-08-27 | 1977-03-01 | Seiko Instr & Electronics Ltd | Equipment for ionic plating |
| JPS54100988A (en) * | 1978-01-27 | 1979-08-09 | Agency Of Ind Science & Technol | Ion plating device |
| JPS5760896B2 (ja) * | 1978-01-27 | 1982-12-22 | Kogyo Gijutsuin | |
| US4974544A (en) * | 1986-10-07 | 1990-12-04 | Ricoh Company, Co. | Vapor deposition apparatus |
| JPS63109162A (ja) * | 1986-10-24 | 1988-05-13 | Res Dev Corp Of Japan | イオンプレ−テイング方法とその装置 |
| JPH0445580B2 (ja) * | 1986-10-24 | 1992-07-27 | Shingijutsu Kaihatsu Jigyodan |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS535871B2 (ja) | 1978-03-02 |