JPS5073705A - - Google Patents

Info

Publication number
JPS5073705A
JPS5073705A JP49110399A JP11039974A JPS5073705A JP S5073705 A JPS5073705 A JP S5073705A JP 49110399 A JP49110399 A JP 49110399A JP 11039974 A JP11039974 A JP 11039974A JP S5073705 A JPS5073705 A JP S5073705A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49110399A
Other languages
Japanese (ja)
Other versions
JPS576573B2 (zh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5073705A publication Critical patent/JPS5073705A/ja
Publication of JPS576573B2 publication Critical patent/JPS576573B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Electron Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP11039974A 1973-11-05 1974-09-25 Expired JPS576573B2 (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US41293373A 1973-11-05 1973-11-05
US41293073A 1973-11-05 1973-11-05

Publications (2)

Publication Number Publication Date
JPS5073705A true JPS5073705A (zh) 1975-06-18
JPS576573B2 JPS576573B2 (zh) 1982-02-05

Family

ID=27021973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11039974A Expired JPS576573B2 (zh) 1973-11-05 1974-09-25

Country Status (4)

Country Link
JP (1) JPS576573B2 (zh)
DE (1) DE2446930A1 (zh)
FR (1) FR2250139B1 (zh)
GB (1) GB1487936A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651736A (en) * 1979-09-18 1981-05-09 Philips Nv Substrateecopying film deposition system* negative resist* and substrate covered with same resist film

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4171417A (en) * 1978-10-30 1979-10-16 Calgon Corporation Polymers with improved solvent holdout in electroconductive paper
EP0240726A3 (en) * 1986-03-05 1987-12-09 Daikin Industries, Limited Resist material
IL141803A0 (en) 1998-09-23 2002-03-10 Du Pont Photoresists, polymers and processes for microlithography
US6849377B2 (en) 1998-09-23 2005-02-01 E. I. Du Pont De Nemours And Company Photoresists, polymers and processes for microlithography
CA2381128A1 (en) 2002-04-09 2003-10-09 Quantiscript Inc. Plasma polymerized electron beam resist

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5651736A (en) * 1979-09-18 1981-05-09 Philips Nv Substrateecopying film deposition system* negative resist* and substrate covered with same resist film
JPS6332374B2 (zh) * 1979-09-18 1988-06-29 Fuiritsupusu Furuuiranpenfuaburiken Nv

Also Published As

Publication number Publication date
JPS576573B2 (zh) 1982-02-05
FR2250139A1 (zh) 1975-05-30
DE2446930A1 (de) 1975-05-07
FR2250139B1 (zh) 1980-06-27
GB1487936A (en) 1977-10-05

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