Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filedfiledCritical
Priority to JP44054506ApriorityCriticalpatent/JPS5036397B1/ja
Priority to US53481Aprioritypatent/US3628009A/en
Publication of JPS5036397B1publicationCriticalpatent/JPS5036397B1/ja
H01J49/00—Particle spectrometers or separator tubes
H01J49/26—Mass spectrometers or separator tubes
H01J49/28—Static spectrometers
H01J49/30—Static spectrometers using magnetic analysers, e.g. Dempster spectrometer
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
Landscapes
Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)
Other Investigation Or Analysis Of Materials By Electrical Means
(AREA)