JPS50153581A - - Google Patents

Info

Publication number
JPS50153581A
JPS50153581A JP5965274A JP5965274A JPS50153581A JP S50153581 A JPS50153581 A JP S50153581A JP 5965274 A JP5965274 A JP 5965274A JP 5965274 A JP5965274 A JP 5965274A JP S50153581 A JPS50153581 A JP S50153581A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5965274A
Other languages
Japanese (ja)
Other versions
JPS5724565B2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5965274A priority Critical patent/JPS5724565B2/ja
Publication of JPS50153581A publication Critical patent/JPS50153581A/ja
Publication of JPS5724565B2 publication Critical patent/JPS5724565B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)
  • Control Of Position Or Direction (AREA)
JP5965274A 1974-05-29 1974-05-29 Expired JPS5724565B2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5965274A JPS5724565B2 (ko) 1974-05-29 1974-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5965274A JPS5724565B2 (ko) 1974-05-29 1974-05-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP961183A Division JPS58139436A (ja) 1983-01-24 1983-01-24 平面移動装置用マニピユレ−タ

Publications (2)

Publication Number Publication Date
JPS50153581A true JPS50153581A (ko) 1975-12-10
JPS5724565B2 JPS5724565B2 (ko) 1982-05-25

Family

ID=13119335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5965274A Expired JPS5724565B2 (ko) 1974-05-29 1974-05-29

Country Status (1)

Country Link
JP (1) JPS5724565B2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57160136A (en) * 1981-03-28 1982-10-02 Shinkawa Ltd Manipulator in planar movement system for semiconductor device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4310557Y1 (ko) * 1966-08-12 1968-05-08
JPS4926691A (ko) * 1972-07-05 1974-03-09
JPS4977181A (ko) * 1972-10-30 1974-07-25

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4310557Y1 (ko) * 1966-08-12 1968-05-08
JPS4926691A (ko) * 1972-07-05 1974-03-09
JPS4977181A (ko) * 1972-10-30 1974-07-25

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57160136A (en) * 1981-03-28 1982-10-02 Shinkawa Ltd Manipulator in planar movement system for semiconductor device
JPS6362097B2 (ko) * 1981-03-28 1988-12-01

Also Published As

Publication number Publication date
JPS5724565B2 (ko) 1982-05-25

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