JPS50132980A - - Google Patents

Info

Publication number
JPS50132980A
JPS50132980A JP3799874A JP3799874A JPS50132980A JP S50132980 A JPS50132980 A JP S50132980A JP 3799874 A JP3799874 A JP 3799874A JP 3799874 A JP3799874 A JP 3799874A JP S50132980 A JPS50132980 A JP S50132980A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3799874A
Other languages
Japanese (ja)
Other versions
JPS5244232B2 (US20100223739A1-20100909-C00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3799874A priority Critical patent/JPS5244232B2/ja
Publication of JPS50132980A publication Critical patent/JPS50132980A/ja
Publication of JPS5244232B2 publication Critical patent/JPS5244232B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP3799874A 1974-04-05 1974-04-05 Expired JPS5244232B2 (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3799874A JPS5244232B2 (US20100223739A1-20100909-C00005.png) 1974-04-05 1974-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3799874A JPS5244232B2 (US20100223739A1-20100909-C00005.png) 1974-04-05 1974-04-05

Publications (2)

Publication Number Publication Date
JPS50132980A true JPS50132980A (US20100223739A1-20100909-C00005.png) 1975-10-21
JPS5244232B2 JPS5244232B2 (US20100223739A1-20100909-C00005.png) 1977-11-05

Family

ID=12513232

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3799874A Expired JPS5244232B2 (US20100223739A1-20100909-C00005.png) 1974-04-05 1974-04-05

Country Status (1)

Country Link
JP (1) JPS5244232B2 (US20100223739A1-20100909-C00005.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244753A (ja) * 1987-03-31 1988-10-12 Toshiba Corp 結晶欠陥認識処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63244753A (ja) * 1987-03-31 1988-10-12 Toshiba Corp 結晶欠陥認識処理方法

Also Published As

Publication number Publication date
JPS5244232B2 (US20100223739A1-20100909-C00005.png) 1977-11-05

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