JPS50109556U - - Google Patents

Info

Publication number
JPS50109556U
JPS50109556U JP1857274U JP1857274U JPS50109556U JP S50109556 U JPS50109556 U JP S50109556U JP 1857274 U JP1857274 U JP 1857274U JP 1857274 U JP1857274 U JP 1857274U JP S50109556 U JPS50109556 U JP S50109556U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1857274U
Other languages
Japanese (ja)
Other versions
JPS5348589Y2 (US20090182215A1-20090716-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1857274U priority Critical patent/JPS5348589Y2/ja
Publication of JPS50109556U publication Critical patent/JPS50109556U/ja
Application granted granted Critical
Publication of JPS5348589Y2 publication Critical patent/JPS5348589Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Vertical, Hearth, Or Arc Furnaces (AREA)
JP1857274U 1974-02-18 1974-02-18 Expired JPS5348589Y2 (US20090182215A1-20090716-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1857274U JPS5348589Y2 (US20090182215A1-20090716-C00004.png) 1974-02-18 1974-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1857274U JPS5348589Y2 (US20090182215A1-20090716-C00004.png) 1974-02-18 1974-02-18

Publications (2)

Publication Number Publication Date
JPS50109556U true JPS50109556U (US20090182215A1-20090716-C00004.png) 1975-09-08
JPS5348589Y2 JPS5348589Y2 (US20090182215A1-20090716-C00004.png) 1978-11-21

Family

ID=28104761

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1857274U Expired JPS5348589Y2 (US20090182215A1-20090716-C00004.png) 1974-02-18 1974-02-18

Country Status (1)

Country Link
JP (1) JPS5348589Y2 (US20090182215A1-20090716-C00004.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5128515A (en) * 1990-05-21 1992-07-07 Tokyo Electron Sagami Limited Heating apparatus

Also Published As

Publication number Publication date
JPS5348589Y2 (US20090182215A1-20090716-C00004.png) 1978-11-21

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