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Publication of JPS50105383ApublicationCriticalpatent/JPS50105383A/ja
Publication of JPS6022496B2publicationCriticalpatent/JPS6022496B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals