JPS4979787A - - Google Patents
Info
- Publication number
- JPS4979787A JPS4979787A JP47122516A JP12251672A JPS4979787A JP S4979787 A JPS4979787 A JP S4979787A JP 47122516 A JP47122516 A JP 47122516A JP 12251672 A JP12251672 A JP 12251672A JP S4979787 A JPS4979787 A JP S4979787A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47122516A JPS4979787A (https=) | 1972-12-08 | 1972-12-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47122516A JPS4979787A (https=) | 1972-12-08 | 1972-12-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4979787A true JPS4979787A (https=) | 1974-08-01 |
Family
ID=14837770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47122516A Pending JPS4979787A (https=) | 1972-12-08 | 1972-12-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4979787A (https=) |
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1972
- 1972-12-08 JP JP47122516A patent/JPS4979787A/ja active Pending