JPS4972184A - - Google Patents

Info

Publication number
JPS4972184A
JPS4972184A JP11302672A JP11302672A JPS4972184A JP S4972184 A JPS4972184 A JP S4972184A JP 11302672 A JP11302672 A JP 11302672A JP 11302672 A JP11302672 A JP 11302672A JP S4972184 A JPS4972184 A JP S4972184A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11302672A
Other languages
Japanese (ja)
Other versions
JPS5137837B2 (US08066781-20111129-C00013.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47113026A priority Critical patent/JPS5137837B2/ja
Publication of JPS4972184A publication Critical patent/JPS4972184A/ja
Publication of JPS5137837B2 publication Critical patent/JPS5137837B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP47113026A 1972-11-13 1972-11-13 Expired JPS5137837B2 (US08066781-20111129-C00013.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47113026A JPS5137837B2 (US08066781-20111129-C00013.png) 1972-11-13 1972-11-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47113026A JPS5137837B2 (US08066781-20111129-C00013.png) 1972-11-13 1972-11-13

Publications (2)

Publication Number Publication Date
JPS4972184A true JPS4972184A (US08066781-20111129-C00013.png) 1974-07-12
JPS5137837B2 JPS5137837B2 (US08066781-20111129-C00013.png) 1976-10-18

Family

ID=14601570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47113026A Expired JPS5137837B2 (US08066781-20111129-C00013.png) 1972-11-13 1972-11-13

Country Status (1)

Country Link
JP (1) JPS5137837B2 (US08066781-20111129-C00013.png)

Also Published As

Publication number Publication date
JPS5137837B2 (US08066781-20111129-C00013.png) 1976-10-18

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