JPS4972072A - - Google Patents

Info

Publication number
JPS4972072A
JPS4972072A JP11620572A JP11620572A JPS4972072A JP S4972072 A JPS4972072 A JP S4972072A JP 11620572 A JP11620572 A JP 11620572A JP 11620572 A JP11620572 A JP 11620572A JP S4972072 A JPS4972072 A JP S4972072A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11620572A
Other languages
Japanese (ja)
Other versions
JPS5515305B2 (US20090182215A1-20090716-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11620572A priority Critical patent/JPS5515305B2/ja
Publication of JPS4972072A publication Critical patent/JPS4972072A/ja
Publication of JPS5515305B2 publication Critical patent/JPS5515305B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Accessory Devices And Overall Control Thereof (AREA)
JP11620572A 1972-11-21 1972-11-21 Expired JPS5515305B2 (US20090182215A1-20090716-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11620572A JPS5515305B2 (US20090182215A1-20090716-C00004.png) 1972-11-21 1972-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11620572A JPS5515305B2 (US20090182215A1-20090716-C00004.png) 1972-11-21 1972-11-21

Publications (2)

Publication Number Publication Date
JPS4972072A true JPS4972072A (US20090182215A1-20090716-C00004.png) 1974-07-11
JPS5515305B2 JPS5515305B2 (US20090182215A1-20090716-C00004.png) 1980-04-22

Family

ID=14681427

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11620572A Expired JPS5515305B2 (US20090182215A1-20090716-C00004.png) 1972-11-21 1972-11-21

Country Status (1)

Country Link
JP (1) JPS5515305B2 (US20090182215A1-20090716-C00004.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5946381A (ja) * 1982-09-07 1984-03-15 Nippon Telegr & Teleph Corp <Ntt> 極高真空排気法
JPS62126580U (US20090182215A1-20090716-C00004.png) * 1987-01-05 1987-08-11

Also Published As

Publication number Publication date
JPS5515305B2 (US20090182215A1-20090716-C00004.png) 1980-04-22

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