JPS4934850A - - Google Patents
Info
- Publication number
- JPS4934850A JPS4934850A JP7351972A JP7351972A JPS4934850A JP S4934850 A JPS4934850 A JP S4934850A JP 7351972 A JP7351972 A JP 7351972A JP 7351972 A JP7351972 A JP 7351972A JP S4934850 A JPS4934850 A JP S4934850A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Linear Or Angular Velocity Measurement And Their Indicating Devices (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7351972A JPS5149421B2 (https=) | 1972-07-24 | 1972-07-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7351972A JPS5149421B2 (https=) | 1972-07-24 | 1972-07-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4934850A true JPS4934850A (https=) | 1974-03-30 |
| JPS5149421B2 JPS5149421B2 (https=) | 1976-12-27 |
Family
ID=13520560
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7351972A Expired JPS5149421B2 (https=) | 1972-07-24 | 1972-07-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5149421B2 (https=) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51119253A (en) * | 1975-01-17 | 1976-10-19 | Farrand Ind Inc | Tranducer |
| JPS5373154A (en) * | 1976-12-10 | 1978-06-29 | Mitsutoyo Seisakusho | Electrostatic capacity type displacement detector |
| JPS53159037U (https=) * | 1977-05-18 | 1978-12-13 | ||
| JPS5429009U (https=) * | 1977-07-29 | 1979-02-26 | ||
| JPS56107120A (en) * | 1979-07-17 | 1981-08-25 | Peerbolte Gerrit H | Capacitor type gauge |
| JPS57182614A (en) * | 1981-05-07 | 1982-11-10 | Ibm | Capacitive transducer |
| JPH02112701A (ja) * | 1988-08-11 | 1990-04-25 | Siemens Ag | 長さまたは間隔変化の測定検出器 |
| JP2009053183A (ja) * | 2007-07-31 | 2009-03-12 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| JP2009288058A (ja) * | 2008-05-29 | 2009-12-10 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| WO2010023767A1 (ja) * | 2008-09-01 | 2010-03-04 | パイオニア株式会社 | 変位センサ |
| WO2010023766A1 (ja) * | 2008-09-01 | 2010-03-04 | パイオニア株式会社 | 変位センサ |
-
1972
- 1972-07-24 JP JP7351972A patent/JPS5149421B2/ja not_active Expired
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51119253A (en) * | 1975-01-17 | 1976-10-19 | Farrand Ind Inc | Tranducer |
| JPS5373154A (en) * | 1976-12-10 | 1978-06-29 | Mitsutoyo Seisakusho | Electrostatic capacity type displacement detector |
| JPS53159037U (https=) * | 1977-05-18 | 1978-12-13 | ||
| JPS5429009U (https=) * | 1977-07-29 | 1979-02-26 | ||
| JPS56107120A (en) * | 1979-07-17 | 1981-08-25 | Peerbolte Gerrit H | Capacitor type gauge |
| JPS57182614A (en) * | 1981-05-07 | 1982-11-10 | Ibm | Capacitive transducer |
| JPH02112701A (ja) * | 1988-08-11 | 1990-04-25 | Siemens Ag | 長さまたは間隔変化の測定検出器 |
| JP2009053183A (ja) * | 2007-07-31 | 2009-03-12 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| JP2009288058A (ja) * | 2008-05-29 | 2009-12-10 | Kyocera Corp | ステージの位置変動検出装置およびこれを備えた搬送装置 |
| WO2010023767A1 (ja) * | 2008-09-01 | 2010-03-04 | パイオニア株式会社 | 変位センサ |
| WO2010023766A1 (ja) * | 2008-09-01 | 2010-03-04 | パイオニア株式会社 | 変位センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5149421B2 (https=) | 1976-12-27 |