JPS4933574A - - Google Patents
Info
- Publication number
- JPS4933574A JPS4933574A JP7418272A JP7418272A JPS4933574A JP S4933574 A JPS4933574 A JP S4933574A JP 7418272 A JP7418272 A JP 7418272A JP 7418272 A JP7418272 A JP 7418272A JP S4933574 A JPS4933574 A JP S4933574A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7418272A JPS5516370B2 (https=) | 1972-07-26 | 1972-07-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7418272A JPS5516370B2 (https=) | 1972-07-26 | 1972-07-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4933574A true JPS4933574A (https=) | 1974-03-28 |
| JPS5516370B2 JPS5516370B2 (https=) | 1980-05-01 |
Family
ID=13539758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7418272A Expired JPS5516370B2 (https=) | 1972-07-26 | 1972-07-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5516370B2 (https=) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5191662A (https=) * | 1975-02-07 | 1976-08-11 | ||
| JPS53124979A (en) * | 1977-04-07 | 1978-10-31 | Fujitsu Ltd | Plasma etching method |
| JPS5493634A (en) * | 1978-01-06 | 1979-07-24 | Ulvac Corp | Bombard cleaning method by plasma electron beam irraciation of hollow hot cathode |
| JPS58175832A (ja) * | 1983-03-07 | 1983-10-15 | Hitachi Ltd | プラズマ処理装置 |
-
1972
- 1972-07-26 JP JP7418272A patent/JPS5516370B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5191662A (https=) * | 1975-02-07 | 1976-08-11 | ||
| JPS53124979A (en) * | 1977-04-07 | 1978-10-31 | Fujitsu Ltd | Plasma etching method |
| JPS5493634A (en) * | 1978-01-06 | 1979-07-24 | Ulvac Corp | Bombard cleaning method by plasma electron beam irraciation of hollow hot cathode |
| JPS58175832A (ja) * | 1983-03-07 | 1983-10-15 | Hitachi Ltd | プラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5516370B2 (https=) | 1980-05-01 |