JPS4929969A - - Google Patents

Info

Publication number
JPS4929969A
JPS4929969A JP47072865A JP7286572A JPS4929969A JP S4929969 A JPS4929969 A JP S4929969A JP 47072865 A JP47072865 A JP 47072865A JP 7286572 A JP7286572 A JP 7286572A JP S4929969 A JPS4929969 A JP S4929969A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP47072865A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47072865A priority Critical patent/JPS4929969A/ja
Priority to US380100A priority patent/US3878424A/en
Priority to FR7326591A priority patent/FR2194043A1/fr
Priority to DE19732337142 priority patent/DE2337142A1/de
Publication of JPS4929969A publication Critical patent/JPS4929969A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
JP47072865A 1972-07-20 1972-07-20 Pending JPS4929969A (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP47072865A JPS4929969A (de) 1972-07-20 1972-07-20
US380100A US3878424A (en) 1972-07-20 1973-07-17 Electron beam generating source
FR7326591A FR2194043A1 (de) 1972-07-20 1973-07-19
DE19732337142 DE2337142A1 (de) 1972-07-20 1973-07-20 Elektronenquelle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47072865A JPS4929969A (de) 1972-07-20 1972-07-20

Publications (1)

Publication Number Publication Date
JPS4929969A true JPS4929969A (de) 1974-03-16

Family

ID=13501645

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47072865A Pending JPS4929969A (de) 1972-07-20 1972-07-20

Country Status (4)

Country Link
US (1) US3878424A (de)
JP (1) JPS4929969A (de)
DE (1) DE2337142A1 (de)
FR (1) FR2194043A1 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022066532A (ja) * 2017-04-11 2022-04-28 エーエスエムエル ネザーランズ ビー．ブイ． 荷電粒子源モジュール

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2459665C2 (de) * 1974-12-17 1982-12-30 Siemens AG, 1000 Berlin und 8000 München Anordnung zum Herstellen eines Körperschnittbildes mit fächerförmigen Bündeln von Röntgenstrahlen
US4020318A (en) * 1975-01-24 1977-04-26 The Welding Institute Electron beam generators
JPS6023455B2 (ja) * 1978-10-17 1985-06-07 株式会社東芝 直熱形陰極構体
NL7906958A (nl) * 1979-09-19 1981-03-23 Philips Nv Metaaldraadkathode voor elektronenstraalapparaat.
FR2471666A1 (fr) * 1979-12-14 1981-06-19 Labo Electronique Physique Canon electronique a courant de faisceau ajustable et de densite uniforme
DE3029853C2 (de) * 1980-08-07 1982-08-26 Standard Elektrik Lorenz Ag, 7000 Stuttgart Indirekt durch Elektronenstoß geheizte Wehneltkathode
DE3332549A1 (de) * 1983-09-09 1985-03-28 Fa. Carl Zeiss, 7920 Heidenheim Verfahren und vorrichtung zur vermeidung von kathodenschaeden beim einschalten von feldemissionsstrahlern
DE3930201A1 (de) * 1989-09-09 1991-03-14 Ptr Praezisionstech Gmbh Kontakt zur uebertragung eines elektrischen stroms, insbesondere fuer eine elektronenstrahlkanone
EP0417640B1 (de) * 1989-09-09 1996-12-04 Ptr Präzisionstechnik Gmbh Katodenhalter für einen Elektronenstrahlerzeuger
US5182488A (en) * 1991-08-27 1993-01-26 The Boc Group, Inc. Electron beam gun for use in an electron beam evaporation source

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2522259A (en) * 1948-05-06 1950-09-12 Bell Telephone Labor Inc Electrode temperature regulation
US3005123A (en) * 1959-07-16 1961-10-17 Griffiths Electronics Inc Electron gun construction
US3389290A (en) * 1965-04-06 1968-06-18 Sony Corp Electron gun device
US3500106A (en) * 1965-09-10 1970-03-10 Bell & Howell Co Cathode
GB1191191A (en) * 1968-05-08 1970-05-06 Hitachi Ltd Improvements in Electron Microscopes
US3610988A (en) * 1968-12-12 1971-10-05 Telefunken Patent Cathode arrangement and cathode-ray tube having such a cathode arrangement
US3763388A (en) * 1971-10-19 1973-10-02 Gte Sylvania Inc Cathode ray tube electron gun
US3792263A (en) * 1972-09-13 1974-02-12 Jeol Ltd Scanning electron microscope with means to remove low energy electrons from the primary electron beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022066532A (ja) * 2017-04-11 2022-04-28 エーエスエムエル ネザーランズ ビー．ブイ． 荷電粒子源モジュール

Also Published As

Publication number Publication date
DE2337142A1 (de) 1974-02-14
US3878424A (en) 1975-04-15
FR2194043A1 (de) 1974-02-22

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