JPS4923346A - - Google Patents
Info
- Publication number
- JPS4923346A JPS4923346A JP6652572A JP6652572A JPS4923346A JP S4923346 A JPS4923346 A JP S4923346A JP 6652572 A JP6652572 A JP 6652572A JP 6652572 A JP6652572 A JP 6652572A JP S4923346 A JPS4923346 A JP S4923346A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6652572A JPS5033273B2 (https=) | 1972-06-30 | 1972-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6652572A JPS5033273B2 (https=) | 1972-06-30 | 1972-06-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4923346A true JPS4923346A (https=) | 1974-03-01 |
| JPS5033273B2 JPS5033273B2 (https=) | 1975-10-29 |
Family
ID=13318362
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6652572A Expired JPS5033273B2 (https=) | 1972-06-30 | 1972-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5033273B2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249991A (en) * | 1975-10-17 | 1977-04-21 | Matsushita Electric Ind Co Ltd | Sputtering method |
| JPS52110181U (https=) * | 1976-02-17 | 1977-08-22 | ||
| JPS54178158U (https=) * | 1978-06-06 | 1979-12-15 |
-
1972
- 1972-06-30 JP JP6652572A patent/JPS5033273B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5249991A (en) * | 1975-10-17 | 1977-04-21 | Matsushita Electric Ind Co Ltd | Sputtering method |
| JPS52110181U (https=) * | 1976-02-17 | 1977-08-22 | ||
| JPS54178158U (https=) * | 1978-06-06 | 1979-12-15 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5033273B2 (https=) | 1975-10-29 |