JPS4915552B1 - - Google Patents
Info
- Publication number
- JPS4915552B1 JPS4915552B1 JP3704470A JP3704470A JPS4915552B1 JP S4915552 B1 JPS4915552 B1 JP S4915552B1 JP 3704470 A JP3704470 A JP 3704470A JP 3704470 A JP3704470 A JP 3704470A JP S4915552 B1 JPS4915552 B1 JP S4915552B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3704470A JPS4915552B1 (zh) | 1970-04-30 | 1970-04-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3704470A JPS4915552B1 (zh) | 1970-04-30 | 1970-04-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS4915552B1 true JPS4915552B1 (zh) | 1974-04-16 |
Family
ID=12486587
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3704470A Pending JPS4915552B1 (zh) | 1970-04-30 | 1970-04-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS4915552B1 (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50131040U (zh) * | 1974-04-10 | 1975-10-28 | ||
JP2014518591A (ja) * | 2011-04-20 | 2014-07-31 | フォルシュングスツェントルム・ユーリッヒ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | 基板に半導体材料を蒸着させる熱線方法及びその方法を実施するための装置 |
-
1970
- 1970-04-30 JP JP3704470A patent/JPS4915552B1/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50131040U (zh) * | 1974-04-10 | 1975-10-28 | ||
JP2014518591A (ja) * | 2011-04-20 | 2014-07-31 | フォルシュングスツェントルム・ユーリッヒ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | 基板に半導体材料を蒸着させる熱線方法及びその方法を実施するための装置 |