JPS4913658U - - Google Patents

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Publication number
JPS4913658U
JPS4913658U JP5340972U JP5340972U JPS4913658U JP S4913658 U JPS4913658 U JP S4913658U JP 5340972 U JP5340972 U JP 5340972U JP 5340972 U JP5340972 U JP 5340972U JP S4913658 U JPS4913658 U JP S4913658U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5340972U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5340972U priority Critical patent/JPS4913658U/ja
Publication of JPS4913658U publication Critical patent/JPS4913658U/ja
Pending legal-status Critical Current

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  • Indicating Measured Values (AREA)
JP5340972U 1972-05-08 1972-05-08 Pending JPS4913658U (US20030157025A1-20030821-C00031.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5340972U JPS4913658U (US20030157025A1-20030821-C00031.png) 1972-05-08 1972-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5340972U JPS4913658U (US20030157025A1-20030821-C00031.png) 1972-05-08 1972-05-08

Publications (1)

Publication Number Publication Date
JPS4913658U true JPS4913658U (US20030157025A1-20030821-C00031.png) 1974-02-05

Family

ID=27935852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5340972U Pending JPS4913658U (US20030157025A1-20030821-C00031.png) 1972-05-08 1972-05-08

Country Status (1)

Country Link
JP (1) JPS4913658U (US20030157025A1-20030821-C00031.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113569A (en) * 1974-07-24 1976-02-03 Suwa Seikosha Kk Handotaisochino seizohoho
JPS5961121A (ja) * 1982-09-30 1984-04-07 Fujitsu Ltd 気相エピタキシャル成長方法
JPS5987813A (ja) * 1982-11-11 1984-05-21 Matsushita Electronics Corp エピタキシヤル成長装置
JPS6136925A (ja) * 1984-07-23 1986-02-21 アルカテル・エヌ・ブイ エピタキシヤル成長法による半導体層構造の製造装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5113569A (en) * 1974-07-24 1976-02-03 Suwa Seikosha Kk Handotaisochino seizohoho
JPS5910050B2 (ja) * 1974-07-24 1984-03-06 セイコーエプソン株式会社 半導体装置の製造方法
JPS5961121A (ja) * 1982-09-30 1984-04-07 Fujitsu Ltd 気相エピタキシャル成長方法
JPH0454965B2 (US20030157025A1-20030821-C00031.png) * 1982-09-30 1992-09-01 Fujitsu Ltd
JPS5987813A (ja) * 1982-11-11 1984-05-21 Matsushita Electronics Corp エピタキシヤル成長装置
JPS6136925A (ja) * 1984-07-23 1986-02-21 アルカテル・エヌ・ブイ エピタキシヤル成長法による半導体層構造の製造装置

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