JPS4911658U - - Google Patents

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Publication number
JPS4911658U
JPS4911658U JP5392472U JP5392472U JPS4911658U JP S4911658 U JPS4911658 U JP S4911658U JP 5392472 U JP5392472 U JP 5392472U JP 5392472 U JP5392472 U JP 5392472U JP S4911658 U JPS4911658 U JP S4911658U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5392472U
Other languages
Japanese (ja)
Other versions
JPS5315246Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5392472U priority Critical patent/JPS5315246Y2/ja
Publication of JPS4911658U publication Critical patent/JPS4911658U/ja
Application granted granted Critical
Publication of JPS5315246Y2 publication Critical patent/JPS5315246Y2/ja
Expired legal-status Critical Current

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  • Connecting Device With Holders (AREA)
JP5392472U 1972-05-08 1972-05-08 Expired JPS5315246Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5392472U JPS5315246Y2 (enrdf_load_stackoverflow) 1972-05-08 1972-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5392472U JPS5315246Y2 (enrdf_load_stackoverflow) 1972-05-08 1972-05-08

Publications (2)

Publication Number Publication Date
JPS4911658U true JPS4911658U (enrdf_load_stackoverflow) 1974-01-31
JPS5315246Y2 JPS5315246Y2 (enrdf_load_stackoverflow) 1978-04-21

Family

ID=27936811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5392472U Expired JPS5315246Y2 (enrdf_load_stackoverflow) 1972-05-08 1972-05-08

Country Status (1)

Country Link
JP (1) JPS5315246Y2 (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148051U (enrdf_load_stackoverflow) * 1976-05-06 1977-11-09
JPS5459263U (enrdf_load_stackoverflow) * 1977-10-03 1979-04-24
JPH02292196A (ja) * 1989-04-28 1990-12-03 Nidek Co Ltd ウェーハ搬送装置
JPH04103652U (ja) * 1991-02-18 1992-09-07 株式会社富士通宮城エレクトロニクス バキユームピンセツト
JPH05206248A (ja) * 1992-01-28 1993-08-13 Nec Kyushu Ltd ウェーハ保持具

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52148051U (enrdf_load_stackoverflow) * 1976-05-06 1977-11-09
JPS5459263U (enrdf_load_stackoverflow) * 1977-10-03 1979-04-24
JPH02292196A (ja) * 1989-04-28 1990-12-03 Nidek Co Ltd ウェーハ搬送装置
JPH04103652U (ja) * 1991-02-18 1992-09-07 株式会社富士通宮城エレクトロニクス バキユームピンセツト
JPH05206248A (ja) * 1992-01-28 1993-08-13 Nec Kyushu Ltd ウェーハ保持具

Also Published As

Publication number Publication date
JPS5315246Y2 (enrdf_load_stackoverflow) 1978-04-21

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