JPS4891970A - - Google Patents

Info

Publication number
JPS4891970A
JPS4891970A JP2339572A JP2339572A JPS4891970A JP S4891970 A JPS4891970 A JP S4891970A JP 2339572 A JP2339572 A JP 2339572A JP 2339572 A JP2339572 A JP 2339572A JP S4891970 A JPS4891970 A JP S4891970A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2339572A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2339572A priority Critical patent/JPS4891970A/ja
Publication of JPS4891970A publication Critical patent/JPS4891970A/ja
Pending legal-status Critical Current

Links

JP2339572A 1972-03-07 1972-03-07 Pending JPS4891970A (US07582779-20090901-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2339572A JPS4891970A (US07582779-20090901-C00044.png) 1972-03-07 1972-03-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2339572A JPS4891970A (US07582779-20090901-C00044.png) 1972-03-07 1972-03-07

Publications (1)

Publication Number Publication Date
JPS4891970A true JPS4891970A (US07582779-20090901-C00044.png) 1973-11-29

Family

ID=12109304

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2339572A Pending JPS4891970A (US07582779-20090901-C00044.png) 1972-03-07 1972-03-07

Country Status (1)

Country Link
JP (1) JPS4891970A (US07582779-20090901-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3901981A1 (en) * 2020-04-24 2021-10-27 IMS Nanofabrication GmbH Charged-particle source

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3901981A1 (en) * 2020-04-24 2021-10-27 IMS Nanofabrication GmbH Charged-particle source
US11735391B2 (en) 2020-04-24 2023-08-22 Ims Nanofabrication Gmbh Charged-particle source

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