JPS4885440A - - Google Patents

Info

Publication number
JPS4885440A
JPS4885440A JP1645972A JP1645972A JPS4885440A JP S4885440 A JPS4885440 A JP S4885440A JP 1645972 A JP1645972 A JP 1645972A JP 1645972 A JP1645972 A JP 1645972A JP S4885440 A JPS4885440 A JP S4885440A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1645972A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1645972A priority Critical patent/JPS4885440A/ja
Publication of JPS4885440A publication Critical patent/JPS4885440A/ja
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
JP1645972A 1972-02-18 1972-02-18 Pending JPS4885440A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1645972A JPS4885440A (cs) 1972-02-18 1972-02-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1645972A JPS4885440A (cs) 1972-02-18 1972-02-18

Publications (1)

Publication Number Publication Date
JPS4885440A true JPS4885440A (cs) 1973-11-13

Family

ID=11916817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1645972A Pending JPS4885440A (cs) 1972-02-18 1972-02-18

Country Status (1)

Country Link
JP (1) JPS4885440A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248977A (en) * 1975-10-15 1977-04-19 Philips Nv Method of manufacturing semiconductor device
JPS58164226A (ja) * 1982-03-24 1983-09-29 Nippon Telegr & Teleph Corp <Ntt> 半導体基板のエツチング法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5248977A (en) * 1975-10-15 1977-04-19 Philips Nv Method of manufacturing semiconductor device
JPS58164226A (ja) * 1982-03-24 1983-09-29 Nippon Telegr & Teleph Corp <Ntt> 半導体基板のエツチング法

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