JPS4881742A - - Google Patents
Info
- Publication number
- JPS4881742A JPS4881742A JP670972A JP670972A JPS4881742A JP S4881742 A JPS4881742 A JP S4881742A JP 670972 A JP670972 A JP 670972A JP 670972 A JP670972 A JP 670972A JP S4881742 A JPS4881742 A JP S4881742A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP670972A JPS5122903B2 (cs) | 1972-01-18 | 1972-01-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP670972A JPS5122903B2 (cs) | 1972-01-18 | 1972-01-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4881742A true JPS4881742A (cs) | 1973-11-01 |
| JPS5122903B2 JPS5122903B2 (cs) | 1976-07-13 |
Family
ID=11645809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP670972A Expired JPS5122903B2 (cs) | 1972-01-18 | 1972-01-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5122903B2 (cs) |
-
1972
- 1972-01-18 JP JP670972A patent/JPS5122903B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5122903B2 (cs) | 1976-07-13 |