JPS4859094A - - Google Patents
Info
- Publication number
- JPS4859094A JPS4859094A JP9517971A JP9517971A JPS4859094A JP S4859094 A JPS4859094 A JP S4859094A JP 9517971 A JP9517971 A JP 9517971A JP 9517971 A JP9517971 A JP 9517971A JP S4859094 A JPS4859094 A JP S4859094A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
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- Catalysts (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9517971A JPS4859094A (en) | 1971-11-29 | 1971-11-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9517971A JPS4859094A (en) | 1971-11-29 | 1971-11-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4859094A true JPS4859094A (en) | 1973-08-18 |
Family
ID=14130506
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9517971A Pending JPS4859094A (en) | 1971-11-29 | 1971-11-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4859094A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5874362A (en) * | 1986-12-19 | 1999-02-23 | Applied Materials, Inc. | Bromine and iodine etch process for silicon and silicides |
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1971
- 1971-11-29 JP JP9517971A patent/JPS4859094A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5874362A (en) * | 1986-12-19 | 1999-02-23 | Applied Materials, Inc. | Bromine and iodine etch process for silicon and silicides |
| US6020270A (en) * | 1986-12-19 | 2000-02-01 | Applied Materials, Inc. | Bomine and iodine etch process for silicon and silicides |