JPS4838169A - - Google Patents

Info

Publication number
JPS4838169A
JPS4838169A JP7118971A JP7118971A JPS4838169A JP S4838169 A JPS4838169 A JP S4838169A JP 7118971 A JP7118971 A JP 7118971A JP 7118971 A JP7118971 A JP 7118971A JP S4838169 A JPS4838169 A JP S4838169A
Authority
JP
Grant status
Application
Patent type
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7118971A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

JP7118971A 1971-09-16 1971-09-16 Pending JPS4838169A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7118971A JPS4838169A (en) 1971-09-16 1971-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7118971A JPS4838169A (en) 1971-09-16 1971-09-16

Publications (1)

Publication Number Publication Date
JPS4838169A true true JPS4838169A (en) 1973-06-05

Family

ID=13453449

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7118971A Pending JPS4838169A (en) 1971-09-16 1971-09-16

Country Status (1)

Country Link
JP (1) JPS4838169A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4615620A (en) * 1983-12-26 1986-10-07 Hitachi, Ltd. Apparatus for measuring the depth of fine engraved patterns
JPS6350705A (en) * 1986-08-21 1988-03-03 Chino Corp Apparatus for measuring film thickness
JPS6350706A (en) * 1986-08-21 1988-03-03 Chino Corp Apparatus for measuring film thickness
WO1989002572A1 (en) * 1987-09-18 1989-03-23 Ricoh Company Ltd. Method and apparatus for measuring refractive index and film thickness
USRE33424E (en) * 1983-12-26 1990-11-06 Hitachi, Ltd. Apparatus and method for measuring the depth of fine engraved patterns
JP2007183143A (en) * 2006-01-06 2007-07-19 Moritex Corp Optical film thickness measuring device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4615620A (en) * 1983-12-26 1986-10-07 Hitachi, Ltd. Apparatus for measuring the depth of fine engraved patterns
USRE33424E (en) * 1983-12-26 1990-11-06 Hitachi, Ltd. Apparatus and method for measuring the depth of fine engraved patterns
JPS6350705A (en) * 1986-08-21 1988-03-03 Chino Corp Apparatus for measuring film thickness
JPS6350706A (en) * 1986-08-21 1988-03-03 Chino Corp Apparatus for measuring film thickness
JPH0466285B2 (en) * 1986-08-21 1992-10-22 Chino Corp
WO1989002572A1 (en) * 1987-09-18 1989-03-23 Ricoh Company Ltd. Method and apparatus for measuring refractive index and film thickness
US5034617A (en) * 1987-09-18 1991-07-23 Ricoh Company, Ltd. Method and apparatus for measuring refractive index and thickness of film
JP2007183143A (en) * 2006-01-06 2007-07-19 Moritex Corp Optical film thickness measuring device

Similar Documents

Publication Publication Date Title
BE789894A (en)
BE779349A (en)
DE2100149B2 (en)
DE2100310C3 (en)
DE2100088C3 (en)
DE2100317C3 (en)
DE2100152A1 (en)
BE777177A (en)
BE790040A (en)
DE2100254C3 (en)
DE2100261A1 (en)
BE783528A (en)
DE2100467A1 (en)
DE2100341A1 (en)
BE790498A (en)
DE2100448A1 (en)
DE2100354A1 (en)
BE782441A (en)
BE776728A (en)
BE766127R (en)
DE2100464A1 (en)
BE791418A (en)
DE2100226A1 (en)
BE786405A (en)
DE2100081C3 (en)