JPS4823385A - - Google Patents
Info
- Publication number
- JPS4823385A JPS4823385A JP2338572D JP2338572D JPS4823385A JP S4823385 A JPS4823385 A JP S4823385A JP 2338572 D JP2338572 D JP 2338572D JP 2338572 D JP2338572 D JP 2338572D JP S4823385 A JPS4823385 A JP S4823385A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
- G01R31/306—Contactless testing using electron beams of printed or hybrid circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/52—Testing for short-circuits, leakage current or ground faults
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/50—Testing of electric apparatus, lines, cables or components for short-circuits, continuity, leakage current or incorrect line connections
- G01R31/54—Testing for continuity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2137619A DE2137619A1 (de) | 1971-07-28 | 1971-07-28 | Verfahren zum pruefen des elektrischen durchganges |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4823385A true JPS4823385A (US20090163788A1-20090625-C00002.png) | 1973-03-26 |
Family
ID=5814995
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2338572D Pending JPS4823385A (US20090163788A1-20090625-C00002.png) | 1971-07-28 | 1942-07-14 | |
| JP7008972A Pending JPS579218B1 (US20090163788A1-20090625-C00002.png) | 1971-07-28 | 1972-07-14 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7008972A Pending JPS579218B1 (US20090163788A1-20090625-C00002.png) | 1971-07-28 | 1972-07-14 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US3764898A (US20090163788A1-20090625-C00002.png) |
| JP (2) | JPS4823385A (US20090163788A1-20090625-C00002.png) |
| DE (1) | DE2137619A1 (US20090163788A1-20090625-C00002.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08160095A (ja) * | 1994-08-31 | 1996-06-21 | Nec Corp | 半導体集積回路チップ上の配線試験方法及びその装置 |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3969670A (en) * | 1975-06-30 | 1976-07-13 | International Business Machines Corporation | Electron beam testing of integrated circuits |
| DE2813948A1 (de) * | 1978-03-31 | 1979-10-11 | Siemens Ag | Verfahren zur elektronischen abbildung der potentialverteilung in einem elektronischen bauelement |
| DE2814049A1 (de) * | 1978-03-31 | 1979-10-18 | Siemens Ag | Verfahren zur beruehrungslosen messung des potentialverlaufs in einem elektronischen bauelement und anordnung zur durchfuehrung des verfahrens |
| DE2813947C2 (de) * | 1978-03-31 | 1986-09-04 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur berührungslosen Messung des Potentialverlaufs in einem elektronischen Bauelement und Anordnung zur Durchführung des Verfahrens |
| DE3036734A1 (de) * | 1980-09-29 | 1982-05-06 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur messung von widerstaenden und kapazitaeten von elektronischen bauelementen |
| US4415851A (en) * | 1981-05-26 | 1983-11-15 | International Business Machines Corporation | System for contactless testing of multi-layer ceramics |
| US4417203A (en) * | 1981-05-26 | 1983-11-22 | International Business Machines Corporation | System for contactless electrical property testing of multi-layer ceramics |
| DE3138929A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Verbessertes sekundaerelektronen-spektrometer fuer die potentialmessung an einer probe mit einer elektronensonde |
| FR2532512A1 (fr) * | 1982-08-25 | 1984-03-02 | Commissariat Energie Atomique | Procede de fabrication d'une matrice de composants electroniques |
| DE3677034D1 (de) * | 1985-03-11 | 1991-02-28 | Nippon Telegraph & Telephone | Methode und geraet zum testen eines integrierten elektronischen bauteils. |
| EP0264482B1 (en) * | 1986-10-23 | 1991-12-18 | International Business Machines Corporation | Method for contactless testing of integrated circuit packaging boards under atmospheric conditions |
| US4843330A (en) * | 1986-10-30 | 1989-06-27 | International Business Machines Corporation | Electron beam contactless testing system with grid bias switching |
| EP0285798A3 (de) * | 1987-03-31 | 1990-03-07 | Siemens Aktiengesellschaft | Vorrichtung für die elektrische Funktionsprüfung von Verdrahtungsfeldern, insbesondere von Leiterplatten |
| US4970461A (en) * | 1989-06-26 | 1990-11-13 | Lepage Andrew J | Method and apparatus for non-contact opens/shorts testing of electrical circuits |
| US5404110A (en) * | 1993-03-25 | 1995-04-04 | International Business Machines Corporation | System using induced current for contactless testing of wiring networks |
| US6359451B1 (en) | 2000-02-11 | 2002-03-19 | Image Graphics Incorporated | System for contactless testing of printed circuit boards |
| WO2001058558A2 (en) | 2000-02-14 | 2001-08-16 | Eco 3 Max Inc. | Process for removing volatile organic compounds from an air stream and apparatus therefor |
| EP1692530A4 (en) * | 2003-11-12 | 2011-01-05 | Ibm | IONIZATION TEST FOR ELECTRICAL VERIFICATION |
| CN101958262B (zh) * | 2009-07-16 | 2012-08-22 | 中芯国际集成电路制造(上海)有限公司 | 失效检测方法以及失效检测装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3373353A (en) * | 1965-09-30 | 1968-03-12 | Navy Usa | Electron beam scanning system for quality control of materials |
| US3531716A (en) * | 1967-06-16 | 1970-09-29 | Agency Ind Science Techn | Method of testing an electronic device by use of an electron beam |
| US3448377A (en) * | 1967-10-12 | 1969-06-03 | Atomic Energy Commission | Method utilizing an electron beam for nondestructively measuring the dielectric properties of a sample |
| US3549999A (en) * | 1968-06-05 | 1970-12-22 | Gen Electric | Method and apparatus for testing circuits by measuring secondary emission electrons generated by electron beam bombardment of the pulsed circuit |
| GB1286454A (en) * | 1968-08-24 | 1972-08-23 | Cambridge Scientific Instr Ltd | Surface potential analysis by electron beams |
| US3702437A (en) * | 1970-06-01 | 1972-11-07 | Western Electric Co | Diagnostic and repair system for semiconductors |
-
1942
- 1942-07-14 JP JP2338572D patent/JPS4823385A/ja active Pending
-
1971
- 1971-07-28 DE DE2137619A patent/DE2137619A1/de active Pending
-
1972
- 1972-05-12 US US00252774A patent/US3764898A/en not_active Expired - Lifetime
- 1972-07-14 JP JP7008972A patent/JPS579218B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08160095A (ja) * | 1994-08-31 | 1996-06-21 | Nec Corp | 半導体集積回路チップ上の配線試験方法及びその装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2137619A1 (de) | 1973-02-08 |
| JPS579218B1 (US20090163788A1-20090625-C00002.png) | 1982-02-20 |
| US3764898A (en) | 1973-10-09 |
