JPS4812039B1 - - Google Patents

Info

Publication number
JPS4812039B1
JPS4812039B1 JP3853069A JP3853069A JPS4812039B1 JP S4812039 B1 JPS4812039 B1 JP S4812039B1 JP 3853069 A JP3853069 A JP 3853069A JP 3853069 A JP3853069 A JP 3853069A JP S4812039 B1 JPS4812039 B1 JP S4812039B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3853069A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3853069A priority Critical patent/JPS4812039B1/ja
Publication of JPS4812039B1 publication Critical patent/JPS4812039B1/ja
Application status is Pending legal-status Critical

Links

JP3853069A 1969-05-20 1969-05-20 Pending JPS4812039B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3853069A JPS4812039B1 (en) 1969-05-20 1969-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3853069A JPS4812039B1 (en) 1969-05-20 1969-05-20

Publications (1)

Publication Number Publication Date
JPS4812039B1 true JPS4812039B1 (en) 1973-04-17

Family

ID=12527818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3853069A Pending JPS4812039B1 (en) 1969-05-20 1969-05-20

Country Status (1)

Country Link
JP (1) JPS4812039B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7405802B2 (en) 2003-06-30 2008-07-29 Asml Holding N.V. Large field of view 2X magnification projection optical system for FPD manufacture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7405802B2 (en) 2003-06-30 2008-07-29 Asml Holding N.V. Large field of view 2X magnification projection optical system for FPD manufacture
US7643128B2 (en) 2003-06-30 2010-01-05 Asml Holding N.V. Large field of view projection optical system with aberration correctability

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