JPS48103888A - - Google Patents
Info
- Publication number
- JPS48103888A JPS48103888A JP47035426A JP3542672A JPS48103888A JP S48103888 A JPS48103888 A JP S48103888A JP 47035426 A JP47035426 A JP 47035426A JP 3542672 A JP3542672 A JP 3542672A JP S48103888 A JPS48103888 A JP S48103888A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coloring (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47035426A JPS5027114B2 (cs) | 1972-04-07 | 1972-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47035426A JPS5027114B2 (cs) | 1972-04-07 | 1972-04-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS48103888A true JPS48103888A (cs) | 1973-12-26 |
| JPS5027114B2 JPS5027114B2 (cs) | 1975-09-05 |
Family
ID=12441526
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47035426A Expired JPS5027114B2 (cs) | 1972-04-07 | 1972-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5027114B2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7482749B2 (ja) * | 2020-10-22 | 2024-05-14 | 東京エレクトロン株式会社 | リフトピンのコンタクト位置調整方法、リフトピンのコンタクト位置検知方法、および基板載置機構 |
-
1972
- 1972-04-07 JP JP47035426A patent/JPS5027114B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5027114B2 (cs) | 1975-09-05 |